Dr. Sujay S. Irudayaraj Profile

Dr. Sujay S. Irudayaraj

at Illinois Institute of Technolo

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Proceedings Article | 2 June 2005 Paper

Understanding the electrical characteristics of micromotors

Ali Emadi, Sujay Irudayaraj

Proceedings Volume 5824, (2005) https://doi.org/10.1117/12.605289

KEYWORDS: Magnetism, Electromagnetism, Capacitance, Dielectrics, Electronics, Microelectromechanical systems, Fabrication, Energy transfer, Electrodes, Feedback control

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This paper presents a comprehensive list of issues related to the electrical characteristics of both electrostatic and electromagnetic micromotors and aims at understanding the behavior of the micromotor from the electrical standpoint. The paper takes the step-by-step approach by first presenting an overview of the laws of electrostatics and electromagnetism for micromachines, their applicability, features and limitations, and then progresses to independently analyze some of the important machine related quantities like electromotive torque, force-output, angular frequencies, supply conditions and requirements, for different types of electrostatic and electromagnetic micromotor constructions. A thorough study on the electric machine parameters that affect the performance of the micromotor need to be performed, since it would serve as a useful link in integrating the micromachine output performance with the fabrication process and challenges associated with it. Achieving such integration would then determine the optimized working condition for the micromotor. The main reason for this study is that although significant advancements have fostered the growth of micromotors in the recent past which has led to the establishment of the micromotor as quite a remarkable machine for powering micromechanical devices, and also as an industrial requirement for various applications, there has always been a concern about the optimal performance of the micromotor, since there is more than just one technology that is being incorporated to realize the micromotor. With fields ranging from surface engineering and chemistry to material science engineering exerting influence on the micromotor design, it becomes very important to completely comprehend the electrophysics of the micromachine that would in turn interact with the science of fabrication to result in the development of better micromotors with considerably less functional complexity.

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