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Tae Joong Ha
at TDNJ Inc.
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Publications (1)
Proceedings Article | 10 April 2024 Poster + Paper
A novel solution for next-generation EUV pellicle: breathable membrane with increased transmittance
Haneul Kim, Jungyeon Kim, Young-Woo Kang, Min-woo Kim, Tae Joong Ha, Gi Sung Lee, Hye-Keun Oh, Jinho Ahn
Proceedings Volume 12953, 129531B (2024) https://doi.org/10.1117/12.3011123
KEYWORDS: Pellicles, Porosity, Transmittance, Extreme ultraviolet, Simulations, Film thickness, Lithography, Extreme ultraviolet lithography, Finite element methods, Critical dimension metrology
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