Mr. Takafumi Taguchi Profile

Takafumi Taguchi

at Toshiba Materials Co Ltd

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 26 May 2010 Paper

Development of computational spacer patterning technology

Hiromitsu Mashita, Takafumi Taguchi, Fumiharu Nakajima, Katsumi Iyanagi, Toshiya Kotani, Shoji Mimotogi, Soichi Inoue

Proceedings Volume 7748, 77480S (2010) https://doi.org/10.1117/12.868940

KEYWORDS: Optical lithography, Photomasks, Lithography, Etching, Critical dimension metrology, Design for manufacturing, Optical proximity correction, Semiconducting wafers, Design for manufacturability, Deposition processes

Read Abstract +

Proceedings Article | 11 May 2009 Paper

Novel OPC and DfM methodology for 3D memory device

Takafumi Taguchi, Toshiya Kotani, Hidefumi Mukai, Hiromitsu Mashita, Katsumi Iyanagi, Koji Hashimoto, Soichi Inoue

Proceedings Volume 7379, 73791O (2009) https://doi.org/10.1117/12.824301

KEYWORDS: Optical proximity correction, Reactive ion etching, Lithography, Personal protective equipment, Design for manufacturing, Etching, Optical design, 3D modeling, Photomasks, Critical dimension metrology

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years