Total electron yield (TEY) is a method for obtaining optical constants by measuring the angle dependence of the yield intensity in the soft X-ray region [S. V. Pepper, J. Opt. Soc. Am. 60, 805 (1970)]. In this study, previous methods are extended by rewriting the previous formulae of yield intensity: the intensity was directly related to a reflectance and phase value corresponding to both the thickness of the uppermost layer and the reflection phase. Phase values obtained practically from the reflection and TEY measurements were found to change in accordance with increases in the thickness of the uppermost Mo layer. Refractive indices were derived from the phase differences between the two different phase values corresponding to the variation in the uppermost Mo layer. Practical study showed that the refractive indices of the uppermost Mo layer are close to those of MoO2.
By analyzing angle-dependent TEY spectra measured with fluorescence spectra, the depth-dependence of the absorbed energy in a Ru/B4C reflection multilayer film was obtained as follows. The periodic multilayer structure was obtained as [Ru 24.38Å/B4C 36.57Å] and [Ru 24.06Å/B4C 36.09Å] by GIXRD and reflectance measurements respectively. The angles of incidence of the fluorescence spectra were determined as 16° and 41° using the angle dependent TEY spectra measured with the fluorescence spectra. The depth-dependence of the absorbed energy, which represents the intensity of the fluorescence spectrum, was calculated using these parameters. These results suggest that an angle-dependent TEY measurement can be used as an easy phase-determination method for standing waves that are generated by a reflection multilayer.
We have measured the polarization degree of the B 1s exciton emission from h-BN under resonance excitation using a multilayer rotating analyzer. We used a Mo/C 101 layers in total as a soft x-ray polarizer. The emission would include the luminescence component due to the direct recombination of the core exciton and the elastic (Rayleigh) scattering of the incident light. We have found a definite contribution of the recombination luminescence to the exciton emission peak.
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