Dr. Tingting Zeng Profile

Dr. Tingting Zeng

at Shanghai Institute of Optics and Fine Mechanics

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Author

Publications (6)

Proceedings Article | 24 November 2023 Poster

UV anti-reflection coatings grown by plasma-enhanced atomic layer deposition

Zesheng Lin, Meiping Zhu, Chen Song, Tianbao Liu, Tingting Zeng, Jian Sun, Jianda Shao

Proceedings Volume PC12726, PC127261J (2023) https://doi.org/10.1117/12.2683211

KEYWORDS: Atomic layer deposition, Antireflective coatings, Ultraviolet radiation, Laser damage threshold, Silica, Annealing, Oxygen, Absorption, Coating, Packaging

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Proceedings Article | 11 September 2020 Presentation

A strategy to improve the long-term stability of low-stress e-beam coatings

Meiping Zhu, Tingting Zeng, Chaoyi Yin, Yuanan Zhao, Jianda Shao

Proceedings Volume 11514, 1151414 (2020) https://doi.org/10.1117/12.2570984

KEYWORDS: Plasma, Ions, Diffusion, Multilayers, Reliability, High power lasers

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Proceedings Article | 8 July 2019 Paper

Influence of deposition temperature and precursor pulse time on properties of SiO2, HfO2 monolayers deposited by PEALD

Chaoyi Yin, Meiping Zhu, Chen Song, Tingting Zeng, Nuo Xu, Yanzhi Wang, Yuanan Zhao, Kui Yi, Jianda Shao

Proceedings Volume 11064, 1106417 (2019) https://doi.org/10.1117/12.2539917

KEYWORDS: Coating, Surface roughness, Silica, Temperature metrology, Laser induced damage, Plasma, Atomic layer deposition, Aluminum, Hafnium

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SPIE Journal Paper | 11 September 2018

Influence of deposition temperature and SiO₂ overcoat layer on laser resistance of 532-nm high-reflection coating

Meiping Zhu, Tingting Zeng, Jingping Li, Jian Sun, Kui Yi, Jianda Shao

OE, Vol. 57, Issue 12, 121902, (September 2018) https://doi.org/10.1117/12.10.1117/1.OE.57.12.121902

KEYWORDS: Hybrid fiber optics, Resistance, Optical coatings, Laser induced damage, Temperature metrology, Thin film coatings, Crystals, High reflection coatings, Surface roughness, Absorption

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SPIE Journal Paper | 31 August 2018

Environmental stability investigation on electron-beam deposited coatings with dense capping layer

Tingting Zeng, Meiping Zhu, Yingjie Chai, Rong-Jun Zhang, Huasong Liu, Chaoyi Yin, Nuo Xu, Yuanan Zhao, Jianda Shao

OE, Vol. 57, Issue 08, 086114, (August 2018) https://doi.org/10.1117/12.10.1117/1.OE.57.8.086114

KEYWORDS: Optical coatings, Transmittance, Hybrid fiber optics, Protactinium, Laser induced damage, Multilayers, Spectroscopy, Optical engineering, Plasma, Ions

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Proceedings Article | 16 May 2018 Paper

Improving the environmental stability of e-beam coatings by employing a PIAD capping layer

Tingting Zeng, Meiping Zhu, Yingjie Chai, Rongjun Zhang, Huasong Liu, Chaoyi Yin, Nuo Xu, Jianda Shao

Proceedings Volume 10713, 107130B (2018) https://doi.org/10.1117/12.2317775

KEYWORDS: Optical coatings, Multilayers, Laser induced damage, Transmittance, Optics manufacturing

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Showing 5 of 6 publications

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