Dr. Tito Flavio Bellunato Profile

Dr. Tito Flavio Bellunato

at STMicroelectronics SRL

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Publications (2)

Proceedings Article | 25 May 2022 Poster + Paper

Lowering the photoresist swing effect to increase the lithographic critical dimension uniformity: one step ahead in perfecting the dual Damascene module

Valentina Dall'Asta, Emma Litterio, Nicoletta Corneo, Bertrand Le-Gratiet, Tito Flavio Bellunato

Proceedings Volume 12055, 120550W (2022) https://doi.org/10.1117/12.2614005

KEYWORDS: Semiconducting wafers, Lithography, Silicon, Reflectivity, Photoresist materials, Photomasks, Scanning electron microscopy, Photomicroscopy

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Proceedings Article | 22 February 2021 Presentation + Paper

Chemistry working for lithography: the Marangoni-effect-based single layer for enhanced planarization

Valentina Dall'Asta, Emma Litterio, Nicoletta Corneo, Jakub Koza, Jonathan Jeauneau, Chiara Bertarelli, Eusebio Barozzi, Tito Bellunato

Proceedings Volume 11612, 116120E (2021) https://doi.org/10.1117/12.2583933

KEYWORDS: Lithography, Chemistry, Yield improvement, Semiconductor manufacturing, Semiconducting wafers, Reliability, Photosensitive materials, Photoresist materials, Manufacturing

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