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Dr. Vitaly Mityukhlyaev
at JSC "NICPV"
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Author
Publications (1)
Proceedings Article | 31 January 2022 Paper
Calibration of step height standards in sub-micrometer range using three-dimensional reconstruction method in a scanning electron microscope
Vitaly Mityukhlyaev, Viktor Maslov
Proceedings Volume 12157, 121571O (2022) https://doi.org/10.1117/12.2624254
KEYWORDS: 3D imaging standards, Curium, Reflectivity
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