Dr. Wanghua Chen Profile

Dr. Wanghua Chen

Research Associate at Ecole Polytechnique

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Publications (2)

Proceedings Article | 1 February 2019 Presentation + Paper

Heteroepitaxial growth of silicon on GaAs via low-temperature plasma-enhanced chemical vapor deposition

G. Hamon, N. Vaissiere, C. Lausecker, R. Cariou, W. Chen, J. Alvarez, J. Maurice, G. Patriarche, L. Largeau, J. Decobert, J. Kleider, P. Roca i Cabarrocas

Proceedings Volume 10926, 109261C (2019) https://doi.org/10.1117/12.2511174

KEYWORDS: Gallium arsenide, Silicon, Plasma enhanced chemical vapor deposition, Plasma, Epitaxy, Doping, Hydrogen, Crystals, Silicon films, X-ray diffraction

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SPIE Journal Paper | 7 April 2017

Plasma-enhanced chemical vapor deposition epitaxy of Si on GaAs for tunnel junction applications in tandem solar cells

Gwenaëlle Hamon, Nicolas Vaissiere, Romain Cariou, Raphaël Lachaume, José Alvarez, Wanghua Chen, Jean-Paul Kleider, Jean Decobert, Pere Roca Cabarrocas

JPE, Vol. 7, Issue 02, 022504, (April 2017) https://doi.org/10.1117/12.10.1117/1.JPE.7.022504

KEYWORDS: Gallium arsenide, Doping, Silicon, Plasma, Plasma enhanced chemical vapor deposition, Hydrogen, Epitaxy, Tandem solar cells, Annealing, Carbon

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