The energy method is applied in the analysis of the elastic coefficients of the crab-leg beam and the guided-end
beam under the micro-nano-scale, the theoretical formula of the elastic coefficient is got. By considering the elastic
coefficient caused by the residual stress and the edge effect of the capacitors, the static electrical and mechanical model
of the grating light modulators is established. According to the static electrical and mechanical model and the actual
design parameters, the pull-in voltage of the GLM with crab-leg beam is 7.2 V and the pull-in voltage of the GLM with
guided-end beam is 9.5 V. The experimental system is built to test the performance of the grating light modulator. By
using this experimental system, the pull-in voltage of the GLM with crab-leg beam is 7.6 V and the pull-in voltage of the
GLM with guided-end beam is 10.2V.
This paper proposes a novel Hadamard Transform near-infrared spectrometer based on MOEMS(Optical
micro-electro-mechanical system ) grating light modulator. A new method that grating light modulator combined with a
single near -infrared detector to detect spectrum is applied. The programmability of the grating light modulator linear
array is used to implement a Hadamard Transform encoding masks. Firstly, optics theory has been used to analyze the
essential principle of the spectrometer and the optical principle of grating light modulator. Then, It is theoretically
proved that the Hadamard Transform near-infrared spectrometer can reconstruct spectrum effectively and have a high
signal noise ratio. Finally, a new structure of the grating light modulator is given. Results of the software simulation
show that 5.5V maximum actuating voltage and 5 kHz response frequency are suitable for a miniature, portable,
cost-efficient spectrometer.
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