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Wenkui Lin
at Suzhou Institute of Nano-Tech and Nano-Bionics CAS
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Publications (1)
Proceedings Article | 20 February 2018 Paper
Fabrication technology of Si face and m face on 4H-SiC (0001) epi-layer based on molten KOH etching
Wen-kui Lin, Chun-hong Zeng, Yu-hua Sun, Xuan Zhang, Zhe Li, Tao-tao Yang, Tao Ju, Bao-shun Zhang
Proceedings Volume 10697, 106974E (2018) https://doi.org/10.1117/12.2307312
KEYWORDS: Silicon carbide, Etching, Wet etching, Crystals, Silicon, Field effect transistors, Semiconducting wafers, Nickel, Scanning electron microscopy, Dry etching
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