Xinchuan Liu
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 3 May 2007 Paper
Proceedings Volume 6556, 65561P (2007) https://doi.org/10.1117/12.721230
KEYWORDS: Silicon, Oxides, Etching, Interfaces, Lithography, Deep reactive ion etching, Oxygen, Semiconducting wafers, Oxidation, Nanowires

Proceedings Article | 3 May 2007 Paper
Xinchuan Liu, Anirban Chakraborty, Ganga Parthasarathi, Cheng Luo
Proceedings Volume 6556, 65560Z (2007) https://doi.org/10.1117/12.721244
KEYWORDS: Polymers, Polymethylmethacrylate, Heterojunctions, Diodes, Capacitors, Metals, Silicon, Aluminum, Lithography, Semiconductors

Proceedings Article | 3 May 2007 Paper
Proceedings Volume 6556, 655608 (2007) https://doi.org/10.1117/12.721275
KEYWORDS: Bridges, Silica, Sensors, Silicon, Etching, Molecular bridges, Semiconducting wafers, Plasma etching, Nickel, Lithium

Proceedings Article | 18 May 2006 Paper
Proceedings Volume 6223, 62230Q (2006) https://doi.org/10.1117/12.666432
KEYWORDS: Sensors, Quantum wells, Molecules, Adsorption, Silicon, Chemical elements, Microfabrication, Logic devices, Microelectromechanical systems, Nanowires

Proceedings Article | 16 May 2005 Paper
Cheng Luo, Fang Meng, Yiyun Guo, Xinchuan Liu, Amitha Govindaraju
Proceedings Volume 5763, (2005) https://doi.org/10.1117/12.600324
KEYWORDS: Silicon, Particles, Lithography, Microfabrication, Temperature metrology, Nanolithography, Semiconducting wafers, Optical lithography, Micromachining, Liquids

Showing 5 of 8 publications
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