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Xingyu Yao
at Liaoning Institute of Measurement
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Publications (1)
Proceedings Article | 8 October 2015 Paper
Analysis of optical flat flatness measuring method with phase-shifting laser interferometer
Proceedings Volume 9677, 96771Y (2015) https://doi.org/10.1117/12.2199905
KEYWORDS: Interferometers, Phase shifts, Optical testing, Charge-coupled devices, Light, Uncertainty analysis, Quantization, Precision optics, Light sources, Reflection
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