Mr. Yuta Sato Profile

Yuta Sato

at Lasertec Co Ltd

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Author

Publications (2)

Proceedings Article | 31 July 2014 Paper

Soft x-ray transmission of contamination blocking filter for SXI onboard ASTRO-H

Takayoshi Kohmura, Kenta Kaneko, Hiroshi Tsunemi, Kiyoshi Hayashida, Ryo Nagino, Shota Inoue, Daiki Uchida, Shuhei Katada, Tadayasu Dotani, Masanobu Ozaki, Hiroshi Tomida, Masashi Kimura, Takeshi Go Tsuru, Shoma Ikeda, Kazunari Yabe, Kento Miyakawa, Masato Andoh, Shintaro Kuwano, Yuta Sato, Kohki Tamasawa, Shoma Tanno, Yuma Yoshino

Proceedings Volume 9144, 91445D (2014) https://doi.org/10.1117/12.2056473

KEYWORDS: X-rays, Aluminum, Contamination, Charge-coupled devices, Absorption, Ultraviolet radiation, Data modeling, X-ray optics, Satellites, X-ray detectors

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Proceedings Article | 11 May 2009 Paper

Improvement of EUVL mask blank inspection capability at Intel

Andy Ma, Ted Liang, Seh-Jin Park, Guojing Zhang, Tomoya Tamura, Kazunori Omata, Yuta Sato, Hal Kusunose

Proceedings Volume 7379, 73790I (2009) https://doi.org/10.1117/12.824259

KEYWORDS: Inspection, Quartz, Silica, Photomasks, Particles, Extreme ultraviolet lithography, Extreme ultraviolet, Defect detection, Surface roughness, Defect inspection

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