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Dr. Yan Xu
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 25 October 2016 Paper
The performance improvement of SRAF placement rules using GA optimization
Yan Xu, Bidan Zhang, Changan Wang, William Wilkinson, John Bolton
Proceedings Volume 9985, 99851C (2016) https://doi.org/10.1117/12.2241015
KEYWORDS: SRAF, Optical proximity correction, Printing, Semiconducting wafers, Computer simulations, Optimization (mathematics), Algorithm development, Model-based design, Genetic algorithms, Photomasks
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