Mr. Chao Yang Profile

Chao Yang

at Institute of Optics and Electronics CAS

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 18 December 2023 Paper

Phase recovery based on support constraint and random binary amplitude modulation ptychography principle

Chao Yang, Haifeng Sun, Hui Pang, Xianchang Zhu, Wei Yan, Song Hu

Proceedings Volume 12967, 129670F (2023) https://doi.org/10.1117/12.3008097

KEYWORDS: Binary data, Complex amplitude, Amplitude modulation, Spatial light modulators, Diffraction, Wavefronts, Phase recovery, Modulation, Reconstruction algorithms, Light sources and illumination

Read Abstract +

Proceedings Article | 13 December 2021 Paper

Image quality compensation via tolerance sensitivity matrix method in lithography

Chao Yang, Xianchang Zhu, Jing Chuan, Xiaolong Cheng, Haifeng Sun, Song Hu

Proceedings Volume 12073, 120730H (2021) https://doi.org/10.1117/12.2626166

KEYWORDS: Tolerancing, Objectives, Image quality, Mirrors, Distortion, Projection lithography, Lithography, Imaging systems, Code v, Motion analysis

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years