Ms. Ye Chen Profile

Ye Chen

at Lawrence Berkeley National Lab

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 6 May 2005 Paper

Ion beam imprinting system

Ye Chen, Lili Ji, Bret van den Akker, Qing Ji, Ka-Ngo Leung, Wigbert Siekhaus

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.598467

KEYWORDS: Ion beams, Ions, Photomasks, Micromachining, Plasma, Argon, Nickel, Titanium, Palladium, Sputter deposition

Read Abstract +

An ion beam imprinting system has been developed at Lawrence Berkeley National Laboratory recently. It is a useful tool to perform micromachining, surface modification, and ion doping etc. The principle of the imprinter is to directly transfer the pattern from the mask to the substrate. It is capable to produce multiple shaped ion beams simultaneously. Therefore it is much more efficient to do micromachining for large volume production than conversional focused ion beam system. Different shaped masks and diverse ion species have been tested both on conductors and insulators. Furthermore, the ion beam imprinter can transfer patterns not only onto a planar target but also onto non-planar surfaces, for example the outer and inner surfaces of cylinders. The imprinting technique can also be applied in three-dimensional micromachining, for example using cylindrical masks to fabricate the medical stents.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years