Dr. Yi-Wei Chang Profile

Dr. Yi-Wei Chang

at Industrial Technology Research Institute

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Author

Publications (6)

Proceedings Article | 28 August 2016 Presentation + Paper

Reduction of batwing effect in white light interferometry for measurement of patterned sapphire substrates (PSS) wafer

Abraham Mario Tapilouw, Yi-Wei Chang, Long-Yo Yu, Hau-Wei Wang

Proceedings Volume 9960, 996006 (2016) https://doi.org/10.1117/12.2236874

KEYWORDS: Optical interferometry, Optical testing, Patterned sapphire substrate, Semiconducting wafers, Light emitting diodes, Light sources, Interferometry, Halogens, Algorithm development, Bandpass filters

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Proceedings Article | 31 January 2013 Paper

Spectrally resolved chromatic confocal interferometry for one-shot nano-scale surface profilometry with several tens of micrometric depth range

Liang-Chia Chen, Yi-Shiuan Chen, Yi-Wei Chang, Shyh-Tsong Lin, Sheng Lih Yeh

Proceedings Volume 8759, 87592C (2013) https://doi.org/10.1117/12.2015027

KEYWORDS: Colorimetry, Confocal microscopy, Interferometry, Optical interferometry, Spectroscopy, Dispersion, Objectives, Calibration, 3D metrology, Interferometers

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Proceedings Article | 31 January 2013 Paper

Chromatic confocal surface profilometry employing signal recovering methodology for simultaneously resolving lateral and axial cross talk problems

Liang-Chia Chen, Tsung-Yi Lin, Yi-Wei Chang, Shyh-Tsong Lin

Proceedings Volume 8759, 87594I (2013) https://doi.org/10.1117/12.2015102

KEYWORDS: Confocal microscopy, Point spread functions, Colorimetry, Deconvolution, Calibration, Signal processing, Near field optics, Sensors, Convolution, Spectroscopy

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SPIE Journal Paper | 15 May 2012

Full-field chromatic confocal surface profilometry employing digital micromirror device correspondence for minimizing lateral cross talks

Liang-Chia Chen, Yi-Wei Chang, Hau-Wei Li

OE, Vol. 51, Issue 8, 081507, (May 2012) https://doi.org/10.1117/12.10.1117/1.OE.51.8.081507

KEYWORDS: Colorimetry, Digital micromirror devices, Confocal microscopy, Sensors, Micromirrors, Calibration, Lithium, Digital imaging, Roentgenium, 3D metrology

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Proceedings Article | 16 November 2011 Paper

Full-field chromatic confocal surface profilometry employing DMD correspondence for minimizing lateral cross talks

Liang-Chia Chen, Hau-Wei Li, Yi-Wei Chang

Proceedings Volume 8321, 832120 (2011) https://doi.org/10.1117/12.904881

KEYWORDS: Colorimetry, Confocal microscopy, Digital micromirror devices, Sensors, Calibration, Micromirrors, Mirrors, Roentgenium, 3D acquisition, Charge-coupled devices

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Proceedings Article | 28 December 2010 Paper

In-situ lateral confocal microscopic surface profilometry with vibration-resistance capability

Liang-Chia Chen, Yi-Wei Chang

Proceedings Volume 7544, 75442E (2010) https://doi.org/10.1117/12.885565

KEYWORDS: Confocal microscopy, Sensors, 3D metrology, Environmental sensing, Interferometry, Fiber lasers, Inspection, Reflectivity, Fiber optics sensors, Fiber optics

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Showing 5 of 6 publications

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