Sb-rich Sb-Te films with different composition were investigated by temperature-dependent resistance measurement, crystal structure characterization, and in situ crystallization behavior study. The results show that when the Sb content is more than 80 at.%, Sb-rich Sb-Te films cannot be used as phase change material due to their low crystallization temperature and small resistance contrast. Sb-rich Sb-Te films with the Sb content being between 80~67 at.% can be used as phase-change-material and they have similar properties because of their similar growth-dominant crystallization behaviors.
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