Dr. Young Joo Choi Profile

Dr. Young Joo Choi

at SAMSUNG Electronics Co Ltd

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Author

Publications (2)

Proceedings Article | 10 April 2024 Paper

EUV source pole control for LCDU and CD ellipticity handling in hexagonal contact arrays

Jieun Song, Janghun Kim, Hyung Jong Bae, Sudeok Kim, Soonmok Ha, Woojin Jung, Seokwon Cho, Jeounghun Park, Dohyeon Park, Eunji Lee, Minseung Song, Hyunseung Ha, Giseon Han, Young Joo Choi, Gyeongseok Park, Seongbo Shim, Chan Hwang

Proceedings Volume 12953, 1295309 (2024) https://doi.org/10.1117/12.3010718

KEYWORDS: Extreme ultraviolet, Mirrors, Light sources and illumination, Semiconducting wafers, Simulations, Nanoimprint lithography, Metrology, Critical dimension metrology, Source mask optimization, Phase shifts

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Proceedings Article | 28 April 2023 Presentation + Paper

Speculation on the EUV photoresist behavior at different dose and pitch

Suk-Koo Hong, Young Joo Choi, Eunseol Kim, Sang Hyun Je, Jun Soo Kim, Jaewoo Nam, Su Min Park

Proceedings Volume 12494, 124940T (2023) https://doi.org/10.1117/12.2658295

KEYWORDS: Extreme ultraviolet, Stochastic processes, Photoresist materials, Extreme ultraviolet lithography, Photons, Design and modelling, Absorbance, Photomasks, Optical lithography, Image quality

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