Dr. Youssry Y. Botros
at Intel Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 29 April 2004 Open Access Paper
Proceedings Volume 5378, (2004) https://doi.org/10.1117/12.543298
KEYWORDS: Process control, Data modeling, Standards development, Semiconducting wafers, Error analysis, Statistical analysis, Control systems, Optical lithography, Data analysis, Nanotechnology

Proceedings Article | 1 July 2003 Paper
Proceedings Volume 5044, (2003) https://doi.org/10.1117/12.485311
KEYWORDS: Process control, Data modeling, Control systems, Semiconducting wafers, Standards development, Computer architecture, System integration, Manufacturing, Statistical analysis, Databases

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