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Yuanyi Zhang
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Publications (4)
Proceedings Article | 22 February 2021 Presentation + Paper
Nano-scale effects of selective spin-on deposition
Ryan Burns, Yuanyi Zhang, Colton D'Ambra, Mark Somervell, Sean Berglund, Michael Carcasi, Lior Huli, Muramatsu Makoto, Rachel Segalman, Craig Hawker, Christopher Bates
Proceedings Volume 11612, 1161205 (2021) https://doi.org/10.1117/12.2583086
Proceedings Article | 25 March 2019 Paper
Ultra-thin conformal coating for spin-on doping applications
Mingqi Li, Bhooshan Popere, Peter Trefonas, Andrew Heitsch, Ratchana Limary, Reika Katsumata, Yuanyi Zhang, Rachel Segalman
Proceedings Volume 10960, 109600R (2019) https://doi.org/10.1117/12.2514830
KEYWORDS: Polymers, Doping, Coating, Silicon, Boron, Semiconducting wafers, Polymer thin films, Annealing, Semiconductors, Chemical species
Proceedings Article | 25 March 2019 Paper
Ordered polymer-based spin-on dopants
Bhooshan Popere, Peter Trefonas, Andrew Heitsch, Mingqi Li, Ratchana Limary, Megan Hoarfrost, Kiniharu Takei, Victor Ho, Ali Javey, Yuanyi Zhang, Reika Katsumata, Rachel Segalman
Proceedings Volume 10960, 1096023 (2019) https://doi.org/10.1117/12.2514822
KEYWORDS: Polymers, Silicon, Annealing, Doping, Polymer thin films, Boron, Chemical species, Diffusion, Ions, Antimony
Proceedings Article | 25 March 2019 Presentation + Paper
Selective spin-on deposition of polymers on heterogeneous surfaces
Yuanyi Zhang, Colton D'Ambra, Reika Katsumata, Rachel Segalman, Craig Hawker, Christopher Bates
Proceedings Volume 10960, 109600Q (2019) https://doi.org/10.1117/12.2515666
KEYWORDS: Polymers, Copper, Coating, Dewetting, Thin film coatings, Self-assembled monolayers, Semiconductors
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