Prof. Zhou Jing Profile

Prof. Zhou Jing

at Beijing Univ of Posts and Telecommunications

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 26 November 2007 Paper

Buffer optimization for high-quality InP-on-GaAs(001) quasi-substrates

Jing Zhou, Xiaomin Ren, Deping Xiong, Jihe Lv, Qi Wang, Yongqing Huang, Hui Huang, Shiwei Cai

Proceedings Volume 6782, 678229 (2007) https://doi.org/10.1117/12.743224

KEYWORDS: Gallium arsenide, Crystals, Gallium, Laser sintering, X-ray diffraction, Interfaces, Heteroepitaxy, Superlattices, Photonic integrated circuits, Transmission electron microscopy

Read Abstract +

In this work, we reported the buffers optimum of high-quality InP epilayer grown on GaAs substrate for fabrication of InP-related devices. First, LT-GaAs (450°C, 15nm)/LT-InP((450°C, 15nm) double LT buffers were deposited on the substrate as the initial layers. The effects of double LT buffers were studied compared with the results of single LT-InP buffer scheme. It was demonstrated that: (i) with a proper LT-GaAs buffer thickness, the double LT-buffer became more "compliant" for strain accommodation than single LT-InP buffer; (ii) there existed an optimal thickness of LT-GaAs buffer for a given thickness of LT-InP layer at which the crystal quality reached the best, just like the conventional buffer optimum process. Second, in order to block the "escaped" dislocations from the buffer/substrate interface, In_xGa_1-xP/InP (x≈0.2) strained superlattices (SLS) were introduced as defect filtering layers before the growth of the final InP layer. We investigated the effects of the periods and inserting position of the SLS on the stress relaxation and the crystal quality of InP top layer. It was suggested that when the total thickness of the epilayer was fixed, both the thickness and the periods and the distance from the interface should be carefully designed to reduce the stress and improve the crystal quality of the epilayer simultaneously. Finally, a 2-μm-thick InP epilayer was grown on GaAs substrate using (450°C, 15nm)/LT-InP(450°C, 15nm) double LT buffers combined with inserting 15-period (4nm/6nm) In_0.8Ga_0.2P/InP SLS into epilayer. Then X-ray diffraction measurements showed the best result of the full width at half maximum (FWHM) was 203 arcsec with estimated dislocation density of 2.8×10⁷ cm^-2.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years