Dr. Jinhwan Byeon Profile

Dr. Jinhwan Byeon

at Gwangju Institute of Science and Technology

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Publications (1)

Proceedings Article | 13 November 2024 Poster

Dry extreme ultraviolet lithography via N-heterocyclic carbene-metal complexes and etchant-free thermal development

Dowon Kim, Sukwon Hong, Jinhwan Byeon, Jaenong Ahn, Sangjin Kim, In-Uk Moon, Huijeong Ryu, Dong Suk Oh, Yang Hun Yoon, Hae-geun Jee, Chan-Cuk Hwang

Proceedings Volume PC13215, PC132150S (2024) https://doi.org/10.1117/12.3034450

KEYWORDS: Photoresist developing, Extreme ultraviolet lithography, Photoresist materials, Extreme ultraviolet, Metals, Optical lithography, Nanotechnology, Nanofabrication, Surface roughness, Standards development

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