Mr. Xinwei Zhang Profile

Xinwei Zhang

at Sichuan Univ

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Publications (2)

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Proceedings Article | 15 February 2022 Paper

Speckle deflectometry based on digital image correlation

Xinwei Zhang, Ruiyang Wang, Dahai Li

Proceedings Volume 12166, 121660A (2022) https://doi.org/10.1117/12.2604963

KEYWORDS: Speckle pattern, Speckle, Mirrors, Digital image correlation, Deflectometry, Cameras, Reflection

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Digital image correlation (DIC) is a widely used non-contact measurement method for the deformation of a diffused object surfaces in the experimental solid mechanics. In specular surface figure measurement, the rapidly developing deflectometry using sinusoidal fringes can achieve a sub-micron level accuracy. The fringe pattern used in the phase shift algorithm is sensitive to noise, but the speckle image used in the DIC technique is robust against noise. In this paper, three kinds of speckle deflectometry methods, which are speckle pattern defletometry(SPD), speckle pattern shifting deflectometry(SPSD) and dynamic speckle deflectometry(DSD), are introduced to measure the figure of specular surface. The principles of the three methods are introduced in detail, and the experimental results are given in order to illustrate the measurement accuracy.

Proceedings Article | 15 February 2022 Paper

In-situ testing of front and rear surfaces of transparent element

Wanxing Zheng, Dahai Li, Ruiyang Wang, Xinwei Zhang, Renhao Ge, Linzhi Yu

Proceedings Volume 12166, 121660B (2022) https://doi.org/10.1117/12.2604992

KEYWORDS: Deflectometry, Optical components, Fringe analysis, Reflection, Ray tracing, Surface finishing

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Phase Measuring Deflectometry (PMD) with high dynamic range and high robustness is a more powerful method to achieve the integration of optical components fabrication and testing, which would avoid the secondary positioning error caused by the removal of optical components in off-line status. However, for surface shape measurement of transparent element, the captured fringe patterns are superposition of the patterns reflected from the front and rear surfaces, leading to the failure of the traditional phase-shifting algorithm to extract the true phase distribution. In order to separate the superposed fringe patterns, the limitations of the existing methods such as UV deflectometry and polarized light deflectometry, which require special light source and polarizer filter, are expensive instrument and complex processes. Moreover, only the front surface shape can be reconstructed at a time, which lowers the efficiency of the measurement. To achieve in-situ measurement of the front and rear surface shapes of the transparent element simultaneously, the combination of PMD and power spectrum estimation is used to separate parasitic fringe patterns. And the front and rear surface shapes are reconstructed using ray tracing and non-linear optimization. The feasibility of the proposed method is demonstrated by numerical simulation. In the experiment, the transparent element with a thickness of about 10 mm is detected and the front and rear surface shapes are reconstructed. The front and rear surface shapes differences of the transparent element with a diameter of 77.8 mm are 173 nm in RMS and 212 nm in RMS, respectively.

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