On the current state of reflective and diffractive X-ray optical elements and their characterization by means of ex-situ and at-wave-length metrology (Conference Presentation)

Frank Siewert; Jana Buchheim; Grzegorz Gwalt; Analia Fernandez Herrero; Stephanie Lemke; Svyatoslav Alimov; Jeniffa Knedel; Tino Seliger; Thomas Zeschke; Stefan Rehbein; Andrey Sokolov

doi:10.1117/12.2666473

9 June 2023 On the current state of reflective and diffractive X-ray optical elements and their characterization by means of ex-situ and at-wave-length metrology (Conference Presentation)

Frank Siewert, Jana Buchheim, Grzegorz Gwalt, Analia Fernandez Herrero, Stephanie Lemke, Svyatoslav Alimov, Jeniffa Knedel, Tino Seliger, Thomas Zeschke, Stefan Rehbein, Andrey Sokolov

Author Affiliations +

Proceedings Volume PC12581, X-Ray Free-Electron Lasers: Advances in Source Development and Instrumentation VI; PC1258109 (2023) https://doi.org/10.1117/12.2666473
Event: SPIE Optics + Optoelectronics, 2023, Prague, Czech Republic

Abstract

Free Electron Laser (FELs) as well as storage-ring-based photon sources have seen an enormous improvement over the past decade regarding stability, brilliance and availability of coherence. To give today`s photon science a benefit from these unique source properties the availability of optical elements of utmost quality is essential. However, their supply is very limited because due to the lack of sufficient manufacturing capacity at companies as well as at laboratories world-wide. Only a few companies are technological skilled to supply mirror or grating substrates of sub-nm quality regarding figure- and finish-error on a sufficient length of aperture. Even more critical is the situation for diffractive optical elements such as gratings or reflection zone plates. Especially gratings of blazed groove-profile are provided by very few manufacturers only with extremely long delivery time and high risk of failure during manufacturing. In this presentation we will report on the current state of quality achieved for different type of X-ray-optical elements like mirrors of different size and geometry as well as gratings, of laminar or blazed groove profile. Further consideration will be given to new developments on the production of blazed gratings like new ruling machines to provide gratings of significant larger aperture size as well as the option to obtain blazed gratings by means of e-beam lithography. In addition we report on the methods to verify their quality by means of ex-situ and at-wave-length metrology during manufacturing and for final acceptance test at facility side.

Conference Presentation

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Frank Siewert, Jana Buchheim, Grzegorz Gwalt, Analia Fernandez Herrero, Stephanie Lemke, Svyatoslav Alimov, Jeniffa Knedel, Tino Seliger, Thomas Zeschke, Stefan Rehbein, and Andrey Sokolov "On the current state of reflective and diffractive X-ray optical elements and their characterization by means of ex-situ and at-wave-length metrology (Conference Presentation)", Proc. SPIE PC12581, X-Ray Free-Electron Lasers: Advances in Source Development and Instrumentation VI, PC1258109 (9 June 2023); https://doi.org/10.1117/12.2666473

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KEYWORDS

Metrology

Optical components

Manufacturing

Reflectivity

X-ray characterization

X-ray diffraction

X-ray optics

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