Controlled growth of 2D heterostructures and prevention of TMD oxidation

E. H. Yang; K. Kang; K. Godin; X. Wang; S. Fu; S. Chen

doi:10.1117/12.2300568

8 May 2018 Controlled growth of 2D heterostructures and prevention of TMD oxidation

E. H. Yang, K. Kang, K. Godin, X. Wang, S. Fu , S. Chen

Proceedings Volume 10639, Micro- and Nanotechnology Sensors, Systems, and Applications X; 106390T (2018) https://doi.org/10.1117/12.2300568
Event: SPIE Defense + Security, 2018, Orlando, FL, United States

Abstract

This paper presents a review of the controlled growth of transition metal dichalcogenide (TMD) heterostructures, and the elucidation of the role of underlying two dimensional (2D) materials on temporal degradation of transition metal dichalcogenides (TMDs). Chemical vapor deposition (CVD)-growth is carried out to achieve localized, patterned, single crystalline or polycrystalline monolayers of TMDs, including MoS₂, WS₂, WSe₂ and MoSe₂, as well as their heterostructures. The localized growth of TMDs has an important implication for nonlinear optics applications. Extensive material characterization is performed to illuminate the role of dissimilar 2D substrates in the prevention of interior defects in TMDs. This characterization provides a detailed observation of the oxidation rates and behaviors of TMDs, which corroborate the role of underlying 2D layers in the prevention of in-air oxidation in TMDs. The epitaxial growth is demonstrated to create TMDs on hBN and graphene, as well as vertical/lateral heterostructures of TMDs, uniquely forming in-phase 2D heterostructures.

Conference Presentation

Citation Download Citation

E. H. Yang, K. Kang, K. Godin, X. Wang, S. Fu , and S. Chen "Controlled growth of 2D heterostructures and prevention of TMD oxidation", Proc. SPIE 10639, Micro- and Nanotechnology Sensors, Systems, and Applications X, 106390T (8 May 2018); https://doi.org/10.1117/12.2300568

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available