Free-form surface measurement based on fringe reflection

Ronggang Zhu

doi:10.1117/12.2550298

20 December 2019 Free-form surface measurement based on fringe reflection

Ronggang Zhu

Proceedings Volume 11209, Eleventh International Conference on Information Optics and Photonics (CIOP 2019); 112095I (2019) https://doi.org/10.1117/12.2550298
Event: Eleventh International Conference on Information Optics and Photonics (CIOP 2019), 2019, Xi'an, China

Abstract

This paper describes the principles and methods of free-form Surface measurement which is based on fringe reflection technique (PMD). This technique is based on incoherent imaging and phase-shfit. CCD camera was used to record images of sinusoid fringes pattern which is generated by computer monitor and reflected respectively by reflector tested. The phase of modulated fringes that test the mirror collected by CCD can be obtained through the phase-shifting algorithm, and the phase of the reference mirror can be calculated according to the structure, so the altitude difference between the two surface shape mentioned above can be obtained by the phase difference between them. The experiment fit the tested surface by 36 zernike polynomial and substitute the gradient data into equations to obtain the measured surface shaped by the least squares solution.

Citation Download Citation

Ronggang Zhu "Free-form surface measurement based on fringe reflection", Proc. SPIE 11209, Eleventh International Conference on Information Optics and Photonics (CIOP 2019), 112095I (20 December 2019); https://doi.org/10.1117/12.2550298

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