Design of linear dispersion spectral confocal objective lens with wide measurement range

Niuhu Wang; Aijun Zeng; Wenqing Jiang; Baoxi Yang

doi:10.1117/12.2601994

9 October 2021 Design of linear dispersion spectral confocal objective lens with wide measurement range

Niuhu Wang, Aijun Zeng, Wenqing Jiang, Baoxi Yang

Proceedings Volume 11895, Optical Design and Testing XI; 1189516 (2021) https://doi.org/10.1117/12.2601994
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Conference Poster

Abstract

Spectral confocal displacement sensor is a high-precision, non-contact displacement sensor, which can be used to measure the surface morphology, thickness and distance. In this paper, the basic principle of spectral confocal displacement measurement is discussed, and a global lens group is designed by using CODEV optical design software. The design method of spectral confocal displacement sensor lens group and aberration analysis are given. The measurement range of the lens group is 2mm, the image space numerical aperture is 0.3, the axial response FWHM is better than 5um, and the resolution is higher. The linear regression analysis shows that the determination coefficient between wavelength and displacement is better than 0.9, and the linear relationship between displacement and wavelength is good.

Citation Download Citation

Niuhu Wang, Aijun Zeng, Wenqing Jiang, and Baoxi Yang "Design of linear dispersion spectral confocal objective lens with wide measurement range", Proc. SPIE 11895, Optical Design and Testing XI, 1189516 (9 October 2021); https://doi.org/10.1117/12.2601994

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available