Optical and anisotropic stress properties of flexible (Ta2O5/SiO2)2 antireflection film deposited by E-gun evaporation with ion-beam assisted deposition

Kun-Hong Chen; Hsi-Chao Chen; Sheng-Bin Chen; Guan Yu Chen; Tsung Tse Wu; Kuo Chou Kai

doi:10.1117/12.2616275

27 October 2021 Optical and anisotropic stress properties of flexible (Ta₂O₅/SiO₂)² antireflection film deposited by E-gun evaporation with ion-beam assisted deposition

Kun-Hong Chen, Hsi-Chao Chen, Sheng-Bin Chen, Guan Yu Chen, Tsung Tse Wu, Kuo Chou Kai

Author Affiliations +

Proceedings Volume 11927, Optical Technology and Measurement for Industrial Applications Conference 2021; 119270P (2021) https://doi.org/10.1117/12.2616275
Event: SPIE Technologies and Applications of Structured Light, 2021, Online, Japan

Abstract

The research proposal was used tantalum pentoxide (Ta2O5) and silicon dioxide (SiO2) as the high and low refractive index for the multilayer anti-reflection (AR) films were deposited on a flexible polyethylene terephthalate (PET) by electron-beam evaporator with ion-beam assisted deposition (IAD). The optical and stress properties of these multilayer (Ta2O5/SiO2)2 films were investigated. A homemade Phase shadow moiré interferometer was used to measure the stresses of single and multilayer films. The experimental results show the optimal oxygen pressure of Ta2O5 and SiO2 were 8 and 25 sccm, respectively for the multilayer AR coating with electron-beam evaporator. The residual stress of the multilayer film stacks changed gradually from tension to compression stresses which +3,167 MPa was for the first layer and -438 MPa for the fourth layer.

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Kun-Hong Chen, Hsi-Chao Chen, Sheng-Bin Chen, Guan Yu Chen, Tsung Tse Wu, and Kuo Chou Kai "Optical and anisotropic stress properties of flexible (Ta₂O₅/SiO₂)² antireflection film deposited by E-gun evaporation with ion-beam assisted deposition", Proc. SPIE 11927, Optical Technology and Measurement for Industrial Applications Conference 2021, 119270P (27 October 2021); https://doi.org/10.1117/12.2616275

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