Overcome machine to machine overlay for better scanner mix-run control

Chieh-Chen Chiu; Feng Tian; Wei Feng; Mingqi Gao; Andy Lan; Aijiao Zhu; Ningqi Zhu; Dan Li; Jin Zhu; Jincheng Pei; Kevin Huang

doi:10.1117/12.2614372

26 May 2022 Overcome machine to machine overlay for better scanner mix-run control

Chieh-Chen Chiu, Feng Tian, Wei Feng, Mingqi Gao, Andy Lan, Aijiao Zhu, Ningqi Zhu, Dan Li, Jin Zhu, Jincheng Pei, Kevin Huang

Author Affiliations +

Proceedings Volume 12053, Metrology, Inspection, and Process Control XXXVI; 1205318 (2022) https://doi.org/10.1117/12.2614372
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States

Conference Poster

Abstract

As semiconductor industry moves to advanced node, capability to well-control On Product Overlay (OPO) becomes a major task force in HVM environment in recent years. In order to continuously sustain OPO at better production level for critical layers, processing on one dedicated immersion (IMM) scanner is a traditional method to meet the quality purpose. However, the tool dedication method impacts IMM scanner throughput and therefore increases cost of ownership for the manufacturing. The ability of smoothly de-stacking the process layers to other IMM scanner without heavily losing OPO performance levels up the full-route productivity, hence enables the cost down opportunity. In this paper, we present a run-to-run APC control methodology and demonstrate the capability to well predict the model terms for inline production scenarios.

Conference Presentation

Citation Download Citation

Chieh-Chen Chiu, Feng Tian, Wei Feng, Mingqi Gao, Andy Lan, Aijiao Zhu, Ningqi Zhu, Dan Li, Jin Zhu, Jincheng Pei, and Kevin Huang "Overcome machine to machine overlay for better scanner mix-run control", Proc. SPIE 12053, Metrology, Inspection, and Process Control XXXVI, 1205318 (26 May 2022); https://doi.org/10.1117/12.2614372

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available