Effects of temporal coherence on EUV lensless imaging

Sara Fernandez; Rajendran Rajeev; Patrick Helfenstein; Dimitrios Kazazis; Yasin Ekinci; Iacopo Mochi

doi:10.1117/12.3010514

9 April 2024 Effects of temporal coherence on EUV lensless imaging

Sara Fernandez, Rajendran Rajeev, Patrick Helfenstein, Dimitrios Kazazis, Yasin Ekinci, Iacopo Mochi

Proceedings Volume 12955, Metrology, Inspection, and Process Control XXXVIII; 129552Y (2024) https://doi.org/10.1117/12.3010514
Event: SPIE Advanced Lithography + Patterning, 2024, San Jose, California, United States

Conference Poster

Abstract

One of the potential applications of coherent di raction imaging (CDI) methods is at-wavelength defect inspection of extreme ultraviolet (EUV) photomasks for future semiconductor technology nodes. Mask defect metrology requires very high resolution as the size of relevant defects is 10 nm or less. In CDI, the resolution is limited by the highest detectable diffraction frequency component. The diffraction signal generated by a small isolated defect drops quickly as the diffraction angle increases and often long integration times are required to achieve a useful signal to noise ratio. With the introduction of states-mixtures into CDI methods, which has been intensively developed in recent years, it is possible to relax the CDI coherence requirements, and thus increase the illumination flux and reduce the exposure time for several types of EUV sources. In this paper, we systematically study the limits of temporal coherence on CDI using EUV synchrotron light and imaging of EUV masks in the reflection mode and we quantify the potential throughput increase for EUV photomask metrology applications.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Sara Fernandez, Rajendran Rajeev, Patrick Helfenstein, Dimitrios Kazazis, Yasin Ekinci, and Iacopo Mochi "Effects of temporal coherence on EUV lensless imaging", Proc. SPIE 12955, Metrology, Inspection, and Process Control XXXVIII, 129552Y (9 April 2024); https://doi.org/10.1117/12.3010514

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