Dr. Patrick Helfenstein Profile

Dr. Patrick Helfenstein

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Proceedings Article | 10 April 2024 Poster + Paper

Effects of temporal coherence on EUV lensless imaging

Sara Fernandez, Rajendran Rajeev, Patrick Helfenstein, Dimitrios Kazazis, Yasin Ekinci, Iacopo Mochi

Proceedings Volume 12955, 129552Y (2024) https://doi.org/10.1117/12.3010514

KEYWORDS: Image restoration, Temporal coherence, Extreme ultraviolet, Light sources and illumination, Image quality, Diffraction, Optical coherence, Scanning electron microscopy, Reconstruction algorithms, Photomasks

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