Author Affiliations +
Houssam Chouaib,1 Teng Shi,1 Anderson Chou,1 Shinya Kawanami,2 Masatomo Takahara,2 Yeunchian Luo,2 Zhijie Leiyin,2 Bin Zeng,3 Derrick Shaughnessy,1 Zhengquan Tan,1 Kaori Sasaki,4 Naoki Momotori5
1KLA Corp. (United States)
2KLA Corp. (Japan)
3KLA Corp. (China)
4KIOXIA Corp. (Japan)
5Western Digital Corp. (Japan)