Paper
11 November 1991 Small-angle scattering measurement
Zu-Han Gu, Richard Sam Dummer
Author Affiliations +
Abstract
Small angle scattering in and near the specular direction has recently been measured with a monostatic laser interferometric reflectometer for a laser beam incident normal to the surface. Employing the Ricean statistics of amplitude distribution for coherent glint with an additive scattered component of speckles, the scattered portion has been partitioned from the total reflected signal at 1.06 and 10.6 micrometers . Such measurements are basic to surface metrology and useful in assessing the performance of mirrors used in lasers and astronomical telescopes.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zu-Han Gu and Richard Sam Dummer "Small-angle scattering measurement", Proc. SPIE 1558, Wave Propagation and Scattering in Varied Media II, (11 November 1991); https://doi.org/10.1117/12.49642
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KEYWORDS
Laser scattering

Scattering

Mirrors

Beam splitters

Signal to noise ratio

Reflectometry

Signal detection

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