EUV spectroscopy of ultrafast capillary discharges

Larry V. Knight; R. Steven Turley; Chris Crawford; Derek Hullinger; Alexander P. Shevelko; Oleg F. Yakushev; Richard Miller

doi:10.1117/12.371139

23 November 1999 EUV spectroscopy of ultrafast capillary discharges

Larry V. Knight, R. Steven Turley, Chris Crawford, Derek Hullinger, Alexander P. Shevelko, Oleg F. Yakushev, Richard Miller

Author Affiliations +

Proceedings Volume 3767, EUV, X-Ray, and Neutron Optics and Sources; (1999) https://doi.org/10.1117/12.371139
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

The observation of EUV spectra of multiply charged ions excited by an ultrafast capillary discharge suggest the possibility of developing an intense compact source of soft x- ray and EUV radiation for practical applications (EUV lithography, microscopy, etc.). The discharge is driven by a compact water transmission line having a very fast current pulse (12 ns FHWM, rise time approximately 1 ns). Spectra of OV-OVI ions from a polyacetal capillary and ArVII-ArVIII ions from an Ar filled capillary were observed and investigated in a spectral range of 100 - 300 Angstrom using a 1-m grazing incidence spectrograph. The resulting capillary discharge plasmas have an electron temperature of approximately 25 - 35 eV, which could be increased to approximately 100 eV using a more powerful transmission line.

Citation Download Citation

Larry V. Knight, R. Steven Turley, Chris Crawford, Derek Hullinger, Alexander P. Shevelko, Oleg F. Yakushev, and Richard Miller "EUV spectroscopy of ultrafast capillary discharges", Proc. SPIE 3767, EUV, X-Ray, and Neutron Optics and Sources, (23 November 1999); https://doi.org/10.1117/12.371139

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