Compensation of phase change upon reflection in white light interferometry

Min-Cheol Park; Seung-Woo Kim

doi:10.1117/12.401757

5 October 2000 Compensation of phase change upon reflection in white light interferometry

Min-Cheol Park, Seung-Woo Kim

Proceedings Volume 4223, Instruments for Optics and Optoelectronic Inspection and Control; (2000) https://doi.org/10.1117/12.401757
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

In this paper we present a compensation method of the phase change upon reflection with a particular aim of measuring step heights using white light interferometry.

Citation Download Citation

Min-Cheol Park and Seung-Woo Kim "Compensation of phase change upon reflection in white light interferometry", Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); https://doi.org/10.1117/12.401757

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