New method to fabricate 3D optical structures into glass-ceramic films

Juha T. Rantala; Ari H. O. Kaerkkaeinen; Jussi A. Hiltunen; Terho K. Kololuoma; Michael R. Descour

doi:10.1117/12.426858

15 May 2001 New method to fabricate 3D optical structures into glass-ceramic films

Juha T. Rantala, Ari H. O. Kaerkkaeinen, Jussi A. Hiltunen, Terho K. Kololuoma, Michael R. Descour

Proceedings Volume 4284, Functional Integration of Opto-Electro-Mechanical Devices and Systems; (2001) https://doi.org/10.1117/12.426858
Event: Symposium on Integrated Optics, 2001, San Jose, CA, United States

Abstract

Liquid phase deposition of sol-gel method derived hybrid glass materials is utilized for fabrication of UV light deformable thin films. The hybrid glass material undergoes a surface-relief deformation when exposed to UV light. The observed deformation phenomenon is in the form of a physical expansion of the exposed areas. The maximum deformation when the material was patterned as a sinusoidal grating was 643 nm. The hybrid glass material features an index of refraction of 1.52, rms surface roughness of 2.25 +/- 0.83 nm after processing, and extinction coefficients of 1.2 10^-3 micrometers ^-1 and 0.47 10^-3 micrometers ^-1 at wavelengths of 633 nm and 1550 nm, respectively.

Citation Download Citation

Juha T. Rantala, Ari H. O. Kaerkkaeinen, Jussi A. Hiltunen, Terho K. Kololuoma, and Michael R. Descour "New method to fabricate 3D optical structures into glass-ceramic films", Proc. SPIE 4284, Functional Integration of Opto-Electro-Mechanical Devices and Systems, (15 May 2001); https://doi.org/10.1117/12.426858

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available