Dr. Juha T. Rantala Profile

Dr. Juha T. Rantala

SPIE Involvement:

Author

Publications (30)

Proceedings Article | 9 April 2024 Presentation + Paper

Presentation + Paper

Designing EUV negative tone resist and underlayer approaches exhibiting 14nm half-pitch resolution

Luong Nguyen Dang, Li-Ting Tseng, Anil Rajak, Thomas Gädda, Markus Laukkanen, Jagadish Salunke, Shima Moosakkani, Jyri Paulasaari, Juha Rantala, Michaela Vockenhuber, Dimitrios Kazazis, Yasin Ekinci

Proceedings Volume 12957, 129570I (2024) https://doi.org/10.1117/12.3014297

KEYWORDS: Electron beam lithography, Solubility, Extreme ultraviolet, Extreme ultraviolet lithography, Silicon, Polymers, Line width roughness, Photoresist materials, Lithography, Spin on carbon materials

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Proceedings Article | 21 March 2022 Presentation

Presentation

Additive Manufacturing Materials for XR Optics

Juha Rantala

Proceedings Volume 11932, 1193220 (2022) https://doi.org/10.1117/12.2635329

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Proceedings Article | 30 March 2021 Presentation

Presentation

inkron: Siloxane and Nanoparticle Based Optical and Electronic Materials

Juha Rantala

Proceedings Volume 11764, 117640H (2021) https://doi.org/10.1117/12.2597462

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Proceedings Article | 5 March 2021 Presentation + Paper

Presentation + Paper

Ultra-high refractive index difference optical materials-integration for optical thin-film structures

Jyri Paulasaari, Juha Rantala, Jukka Perento, Janne Kylmä, Mikko Poutanen

Proceedings Volume 11682, 116820A (2021) https://doi.org/10.1117/12.2578747

KEYWORDS: Coating, Refractive index, Thin films, Integrated optics, Air contamination, Waveguides, Transmittance, Sensors, Scattering, Particles

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Proceedings Article | 25 March 2019 Paper

Paper

Advanced EUV negative tone resist and underlayer approaches exhibiting sub-20nm half-pitch resolution

Thomas Gädda, Nguyen Dang Luong, Markus Laukkanen, Kimmo Karaste, Oskari Kähkönen, Emilia Kauppi, Dimitrios Kazazis, Yasin Ekinci, Juha Rantala

Proceedings Volume 10960, 109600B (2019) https://doi.org/10.1117/12.2515600

KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Polymers, Electron beam lithography, Line width roughness, Silicon, Line edge roughness, Optical lithography, Coating, Scanning electron microscopy

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Proceedings Article | 11 October 2018 Paper

Paper

New resist and underlayer approaches toward EUV lithography

Juha Rantala, Thomas Gädda, Markus Laukkanen, Luong Nguyen Dang, Kimmo Karaste, Dimitrios Kazazis, Yasin Ekinci

Proceedings Volume 10809, 108090X (2018) https://doi.org/10.1117/12.2503107

KEYWORDS: Extreme ultraviolet lithography, Etching, Extreme ultraviolet, Electron beam lithography, System on a chip, Coating, Silicon, Line edge roughness, Metals, Line width roughness

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Proceedings Article | 25 April 2008 Paper

Paper

Integration and characterization of spin on dielectric materials in image sensor devices

Hai Reznik, Ruth Shima Edelstein, Michal Shach-Caplan, Fabian Dulberg, Vladimir Kamenetsky, Kimmo Karaste, Juha Rantala

Proceedings Volume 7001, 70010C (2008) https://doi.org/10.1117/12.786380

KEYWORDS: Thin film coatings, Refractive index, Dielectrics, Microlens, Image sensors, Waveguides, FT-IR spectroscopy, Polymers, Etching, Semiconducting wafers

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Proceedings Article | 28 May 2004 Paper

Paper

Directly UV-photopatternable PLZT thin films prepared with the sol-gel technique

Terho Kololuoma, Jussi Hiltunen, Markus Tuomikoski, Jyrki Lappalainen, Juha Rantala

Proceedings Volume 5355, (2004) https://doi.org/10.1117/12.528803

KEYWORDS: Thin films, Sol-gels, Crystals, Electro optics, Metals, Ferroelectric materials, Fabrication, Zirconium, Refractive index, Electron beam lithography

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SPIE Journal Paper | 1 December 2002

Fabrication and characterization of hybrid-glass-based axicons

Terho Kololuoma, Kari Kataja, Sanna Aikio, Janne Aikio, Juha Rantala

OE, Vol. 41, Issue 12, (December 2002) https://doi.org/10.1117/12.10.1117/1.1518993

KEYWORDS: Axicons, Ultraviolet radiation, Optical components, Diffraction, Chemical elements, Diffraction gratings, Sol-gels, Collimation, Optical testing, Binary data

Proceedings Article | 23 October 2002 Paper

Paper

Fabrication and characterization of Sb-doped Sn02 thin films derived from methacrylic-acid-modified tin(IV)alkoxides

Terho Kololuoma, Ari Tolonen, Leena-Sisko Johansson, Joseph Campbell, Ari Karkkainen, Marianne Hiltunen, Tomi Haatainen, Juha Rantala

Proceedings Volume 4804, (2002) https://doi.org/10.1117/12.453546

KEYWORDS: Tin, Antimony, Thin films, Crystals, Ions, Sodium, Doping, Metals, Oxides, Coating

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Proceedings Article | 10 June 2002 Paper

Paper

Morphological and optical characterization of hybrid-glass-based axicons

Terho Kololuoma, Kari Kataja, Sanna Aikio, Janne Aikio, Juha Rantala

Proceedings Volume 4647, (2002) https://doi.org/10.1117/12.469820

KEYWORDS: Axicons, Optical components, Sol-gels, Diffraction, Chemical elements, Binary data, Semiconductor lasers, Optical design, Collimation, Hybrid optics

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SPIE Journal Paper | 1 April 2002

Wireless infrared data links: ray-trace simulations of diffuse channelsand demonstration of diffractive element for multi-beam transmitters

Mikko Karppinen, Kari Kataja, Jukka-Tapani Maekinen, Sanna Aikio, Hannu Rajaniemi, Pertti Paeaekkoenen, Jari Turunen, Juha Rantala, Pentti Karioja

OE, Vol. 41, Issue 04, (April 2002) https://doi.org/10.1117/12.10.1117/1.1456538

KEYWORDS: Transmitters, Sensors, Monte Carlo methods, Scattering, Receivers, Vertical cavity surface emitting lasers, Computer simulations, Diffraction, Ray tracing, Data modeling

Proceedings Article | 13 December 2001 Paper

Paper

Recent progress in hybrid glass materials for micro-optical component fabrication

Ari Karkkainen, Jeremy Rogers, Ghassan Jabbour, Juha Rantala, Michael Descour

Proceedings Volume 4455, (2001) https://doi.org/10.1117/12.450449

KEYWORDS: Glasses, Photomasks, Optical lithography, Binary data, Surface roughness, Absorbance, Refractive index, Chemical elements, Mercury, Ultraviolet radiation

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Proceedings Article | 15 May 2001 Paper

Paper

Miniaturized organic light-emitting diode (OLED) light source for micro-optical systems

Ari Kaerkkaeinen, Juha Rantala, Maurice Jabbour, Chen Liang, Robert Bedford, Nasser Peyghambarian, Michael Descour, Ghassan Jabbour

Proceedings Volume 4284, (2001) https://doi.org/10.1117/12.426861

KEYWORDS: Organic light emitting diodes, Light sources, Optical components, Photomasks, Chemical elements, Microscopes, Silicon, Electrodes, Glasses, Semiconducting wafers

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Proceedings Article | 15 May 2001 Paper

Paper

New method to fabricate 3D optical structures into glass-ceramic films

Juha Rantala, Ari Kaerkkaeinen, Jussi Hiltunen, Terho Kololuoma, Michael Descour

Proceedings Volume 4284, (2001) https://doi.org/10.1117/12.426858

KEYWORDS: Glasses, Ultraviolet radiation, Diffraction gratings, Diffraction, Sol-gels, Photomasks, Surface roughness, Information operations, Refractive index, Oxides

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Proceedings Article | 15 May 2001 Paper

Paper

Modeling of micro-optical systems by using nonsequential ray tracing

Sanna Aikio, Chen Liang, Jukka-Tapani Maekinen, Juha Rantala, Michael Descour

Proceedings Volume 4284, (2001) https://doi.org/10.1117/12.426863

KEYWORDS: Systems modeling, Ray tracing, Sensors, Waveguides, Chemical fiber sensors, Scattering, Light scattering, Silicon, Microscopes, Mirrors

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Proceedings Article | 15 May 2001 Paper

Paper

Low-cost organic pulse sources for integrated optical modules

Jussi Hiltunen, Juha Rantala

Proceedings Volume 4284, (2001) https://doi.org/10.1117/12.426862

KEYWORDS: Organic light emitting diodes, Electroluminescence, Telescopic pixel displays, Polymers, Excitons, Electron transport, Organic materials, Quantum efficiency, Integrated optics, Luminescence

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Proceedings Article | 1 September 2000 Paper

Paper

Fabrication and packaging of optical components and microsystems

Juha Rantala, Janne Aikio, Pentti Karioja, Michael Descour, Harri Kopola, Jorma Lammasniemi

Proceedings Volume 4075, (2000) https://doi.org/10.1117/12.397926

KEYWORDS: Semiconductor lasers, Fiber lasers, Optical components, Glasses, Mirrors, Silicon, Reflectivity, Tunable lasers, Packaging, Optical alignment

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Proceedings Article | 17 May 2000 Paper

Paper

Combinatorial methods in sol-gel technology

Juha Rantala, Terho Kololuoma, L. Kivimaki

Proceedings Volume 3941, (2000) https://doi.org/10.1117/12.385420

KEYWORDS: Sol-gels, Glasses, Plasma treatment, Thin films, Thin film coatings, Chemistry, Argon, Metals, Semiconductors, Plasma

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Proceedings Article | 2 May 2000 Paper

Paper

Covalent bonding of coumarin molecules to sol-gel matrices for organic light-emitting device applications

Ari Karkkainen, Osmo Hormi, Juha Rantala

Proceedings Volume 3943, (2000) https://doi.org/10.1117/12.384338

KEYWORDS: Molecules, Luminescence, Electroluminescence, Sol-gels, Printed circuit board testing, Oxides, Silicon, Crystals, Electron transport, Silica

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Proceedings Article | 2 May 2000 Paper

Paper

Synthesis of transparent conductive polycerams

Terho Kololuoma, Seppo Nissilae, Juha Rantala

Proceedings Volume 3943, (2000) https://doi.org/10.1117/12.384346

KEYWORDS: Coating, Polymers, Sol-gels, Thin films, Polymethylmethacrylate, Transmittance, Polymer thin films, Glasses, Soda-lime glass, Particles

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Proceedings Article | 2 May 2000 Paper

Paper

Optical and optomechanical structures in hybrid sol-gel materials for use in micro-optical systems

Raviv Levy, Michael Descour, Terho Kololuoma, Sanna Aikio, Juha Rantala

Proceedings Volume 3943, (2000) https://doi.org/10.1117/12.384322

KEYWORDS: Optical components, Sol-gels, Glasses, Silicon, Optical mounts, Ultraviolet radiation, Surface roughness, Photomasks, Etching, Lithography

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Proceedings Article | 10 March 2000 Paper

Paper

Diffractive optical element in free-space data transmission systems

Kari Kataja, Pertti Paakkonen, Jari Turunen, Juha Rantala, Pentti Karioja

Proceedings Volume 3951, (2000) https://doi.org/10.1117/12.379355

KEYWORDS: Diffraction, Vertical cavity surface emitting lasers, Chemical elements, Diffractive optical elements, Transmitters, Beam shaping, Sensors, Data transmission, CCD cameras, Binary data

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Proceedings Article | 31 August 1999 Paper

Paper

Concept for zero-alignment micro-optical systems

Raviv Levy, Michael Descour, Randy Shul, Christi Willison, Mial Warren, Terho Kololuoma, Juha Rantala

Proceedings Volume 3879, (1999) https://doi.org/10.1117/12.360521

KEYWORDS: Optical components, Silicon, Ray tracing, Semiconducting wafers, Photonics, Systems modeling, Optical benches, Photomasks, Sol-gels, Optical alignment

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Proceedings Article | 1 April 1999 Paper

Paper

Strip-loaded structure for ion-exchanged Er3+-doped glass waveguide amplifiers

Gualtiero Nunzi Conti, Pekka Ayras, C. Cavaliere, Bor-Chyuan Hwang, Tao Luo, Juha Rantala, Shibin Jiang, Seppo Honkanen, Nasser Peyghambarian

Proceedings Volume 3622, (1999) https://doi.org/10.1117/12.344501

KEYWORDS: Waveguides, Glasses, Sol-gels, Amplifiers, Diffusion, Absorption, Signal attenuation, Optical amplifiers, Erbium, Optical lithography

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Proceedings Article | 1 April 1999 Paper

Paper

Potential and challenges of sol-gel materials for erbium-doped amplifiers

Juha Rantala, Seppo Honkanen, Nasser Peyghambarian

Proceedings Volume 3622, (1999) https://doi.org/10.1117/12.344509

KEYWORDS: Glasses, Sol-gels, Erbium, Waveguides, Optical amplifiers, Oxides, Ions, Silicon, Aluminum, Silica

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Proceedings Article | 26 March 1999 Paper

Paper

Fabrication of hybrid sol-gel glass diffractive elements

Juha Rantala, Pekka Ayras, Raviv Levy, Michael Descour, Seppo Honkanen, Nasser Peyghambarian

Proceedings Volume 3620, (1999) https://doi.org/10.1117/12.343732

KEYWORDS: Sol-gels, Diffraction, Glasses, Modulation, Lenses, Surface roughness, Silicon, Ultraviolet radiation, Binary data, Thin films

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Proceedings Article | 26 March 1999 Paper

Paper

Transparent conductive sol-gel thin films for photonic applications

Terho Kololuoma, Juha Rantala, Jouko Vaehaekangas, Risto Laitinen

Proceedings Volume 3620, (1999) https://doi.org/10.1117/12.343723

KEYWORDS: Tin, Antimony, Coating, Scanning electron microscopy, Doping, Thin films, Resistance, Optical lithography, Sol-gels, Optical properties

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Proceedings Article | 6 July 1998 Paper

Paper

Electron-radiation-sensitive hybrid sol-gel materials for electron-beam lithography and diffractive optics

Juha Rantala, R. Scott Penner, Seppo Honkanen, Nina Nordman, Olli Nordman, Jouko Vaehaekangas, Mahmoud Fallahi, Nasser Peyghambarian

Proceedings Volume 3469, (1998) https://doi.org/10.1117/12.312923

KEYWORDS: Sol-gels, Waveguides, Glasses, Electron beams, Chemical elements, Fiber Bragg gratings, Lithography, Etching, Fabrication, Optical components

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Proceedings Article | 4 April 1997 Paper

Paper

Lock-in thermographic inspection of wood particle boards

Datong Wu, Antonio Salerno, J. Sembach, Xavier Maldague, Juha Rantala, Gerhard Busse

Proceedings Volume 3056, (1997) https://doi.org/10.1117/12.271647

KEYWORDS: Thermography, Inspection, Particles, Skin, Modulation, Lamps, Infrared imaging, Infrared cameras, Infrared radiation, Defect detection

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Showing 5 of 30 publications

Proceedings Volume Editor (3)

SPIE Conference Volume | 25 June 2004

Emerging Optoelectronic Applications

SPIE Conference Volume | 10 June 2002

Functional Integration of Opto-Electro-Mechanical Devices and Systems II

SPIE Conference Volume | 15 May 2001

Functional Integration of Opto-Electro-Mechanical Devices and Systems

Conference Committee Involvement (8)

Silicon Photonics and Photonic Integrated Circuits

12 April 2010 | Brussels, Belgium

Silicon Photonics and Photonic Integrated Circuits

7 April 2008 | Strasbourg, France

Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits

3 April 2006 | Strasbourg, France

Integrated Optics and Photonic Integrated Circuits

27 April 2004 | Strasbourg, France

Emerging Optoelectronic Applications

26 January 2004 | San Jose, CA, United States

Showing 5 of 8 Conference Committees

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