Characterization and control of a novel micromachined membrane mirror for adaptive wavefront control

David Charles Dayton; Justin D. Mansell; John D. Gonglewski; Sergio R. Restaino

doi:10.1117/12.454717

1 February 2002 Characterization and control of a novel micromachined membrane mirror for adaptive wavefront control

David Charles Dayton, Justin D. Mansell, John D. Gonglewski, Sergio R. Restaino

Proceedings Volume 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III; (2002) https://doi.org/10.1117/12.454717
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

Micromachined electrostatic membrane mirrors have been in use for several years in active and adaptive optics applications. We introduce a deformable mirror with small static aberrations and resistant to damage during electrostatic snap-down in an architecture designed so that a multi-layer dielectric coatings that can be applied before the mirror is released. We also make laboratory performance measurements and produce a closed loop control algorithm.

Citation Download Citation

David Charles Dayton, Justin D. Mansell, John D. Gonglewski, and Sergio R. Restaino "Characterization and control of a novel micromachined membrane mirror for adaptive wavefront control", Proc. SPIE 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III, (1 February 2002); https://doi.org/10.1117/12.454717

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