Lithography: a historical perspective and shape of things to come

Syed A. Rizvi

doi:10.1117/12.472355

1 July 2002 Lithography: a historical perspective and shape of things to come

Syed A. Rizvi

Proceedings Volume 4688, Emerging Lithographic Technologies VI; (2002) https://doi.org/10.1117/12.472355
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

This paper takes a look at the evolution of lithography during the last 50 years and projects its future beyond the era of Next Generation Lithography (NGL). The technologies beyond NGL will require a paradigm shift from the way things are done today. Many new disciplines and processes will emerge that will need to be integrated into existing systems and procedures.

Citation Download Citation

Syed A. Rizvi "Lithography: a historical perspective and shape of things to come", Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); https://doi.org/10.1117/12.472355

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