Development of EUV point diffraction interferometry using the NewSUBARU undulator radiation

Masahito Niibe; Mikihito Mukai; Takeshi Tanaka; Katsumi Sugisaki; Yucong Zhu; Yoshio Gomei

doi:10.1117/12.451354

24 December 2002 Development of EUV point diffraction interferometry using the NewSUBARU undulator radiation

Masahito Niibe, Mikihito Mukai, Takeshi Tanaka, Katsumi Sugisaki, Yucong Zhu, Yoshio Gomei

Proceedings Volume 4782, X-Ray Mirrors, Crystals, and Multilayers II; (2002) https://doi.org/10.1117/12.451354
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

An extreme ultra-violet phase-shifting point diffraction interferometer (PS/PDI) was studied by using the NewSUBARU[1] undulator radiation. The beam line was equipped with a monochromator for PDI measurement. To improve the converging performance of the undulator radiation, a new beam line suitable for PDI was designed. From the examination of monochromaticity required for PDI, the 0^th-order light of the monochromator was used in the experiment. The higher-order radiation of the undulator was eliminated by the reflection band of the Mo/Si multilayer mirrors. By means of improvements of the pre-alignment method and of the mask structure, a higher contrast than ever was achieved in the interference fringes.

Citation Download Citation

Masahito Niibe, Mikihito Mukai, Takeshi Tanaka, Katsumi Sugisaki, Yucong Zhu, and Yoshio Gomei "Development of EUV point diffraction interferometry using the NewSUBARU undulator radiation", Proc. SPIE 4782, X-Ray Mirrors, Crystals, and Multilayers II, (24 December 2002); https://doi.org/10.1117/12.451354

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