Dr. Yucong Zhu Profile

Dr. Yucong Zhu

at Nikon Corp

SPIE Involvement:

Author

Publications (14)

Proceedings Article | 21 March 2008 Paper

EUV wavefront measurement of six-mirror optics using EWMS

K. Sugisaki, M. Okada, K. Otaki, Y. Zhu, J. Kawakami, K. Murakami, C. Ouchi, M. Hasegawa, S. Kato, T. Hasegawa, H. Yokota, T. Honda, M. Niibe

Proceedings Volume 6921, 69212U (2008) https://doi.org/10.1117/12.772624

KEYWORDS: Wavefronts, Diffusion tensor imaging, Optical testing, Extreme ultraviolet, Projection systems, Mirrors, EUV optics, Wavefront metrology, Interferometers, Optics manufacturing

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Proceedings Article | 17 September 2005 Paper

Comparisons between EUV at-wavelength metrological methods

Katsumi Sugisaki, Masashi Okada, Yucong Zhu, Katsura Otaki, Zhiqiang Liu, Jun Kawakami, Mikihiko Ishii, Jun Saito, Katsuhiko Murakami, Masanobu Hasegawa, Chidane Ouchi, Seima Kato, Takayuki Hasegawa, Akiyoshi Suzuki, Hideo Yokota, Masahito Niibe, Mitsuo Takeda

Proceedings Volume 5921, 59210D (2005) https://doi.org/10.1117/12.616676

KEYWORDS: Wavefronts, Optical testing, Extreme ultraviolet, Metrology, Diffusion tensor imaging, Charge-coupled devices, EUV optics, Interferometers, Shearing interferometers, Diffraction

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Proceedings Article | 10 May 2005 Paper

Experimental comparison of absolute PDI and lateral shearing interferometer

Yucong Zhu, Katsumi Sugisaki, Masashi Okada, Katsura Otaki, Zhiqian Liu, Mikihiko Ishii, Jun Kawakami, Jun Saito, Katsuhiko Murakami, Chidane Ouchi, Masanobu Hasegawa, Seima Kato, Takayuki Hasegawa, Akiyoshi Suzuki, Masahito Niibe

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.600274

KEYWORDS: Wavefronts, Shearing interferometers, Diffraction gratings, Extreme ultraviolet lithography, Extreme ultraviolet, Charge-coupled devices, Diffraction, Interferometers, Photomasks, Monochromatic aberrations

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Proceedings Article | 10 May 2005 Paper

Double-grating lateral shearing interferometer for EUV optics at-wavelength measurement

Zhiqiang Liu, Masashi Okada, Katsumi Sugisaki, Mikihiko Ishii, Yucong Zhu, Katsura Ohtaki, Jun Saito, Akiyoshi Suzuki, Masanobu Hasegawa, Chidane Ouchi, Seima Kato, Masahito Niibe, Katsuhiko Murakami

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599456

KEYWORDS: Diffraction, Diffraction gratings, Calibration, Shearing interferometers, Wavefronts, Light sources, Interferometers, Monochromatic aberrations, Extreme ultraviolet lithography, EUV optics

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Proceedings Article | 6 May 2005 Paper

Comparison of EUV interferometry methods in EUVA project

Seima Kato, Chidane Ouchi, Masanobu Hasegawa, Akiyoshi Suzuki, Takayuki Hasegawa, Katsumi Sugisaki, Masashi Okada, Yucong Zhu, Katsuhiko Murakami, Jun Saito, Masahito Niibe, Mitsuo Takeda

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.600468

KEYWORDS: Wavefronts, Optical testing, Diffraction, Charge-coupled devices, Extreme ultraviolet, Monochromatic aberrations, Interferometers, Phase shifts, Calibration, Diffraction gratings

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Proceedings Article | 20 May 2004 Paper

Lateral shearing interferometer for EUVL: theoretical analysis and experiment

Yucong Zhu, Katsumi Sugisaki, Chidane Ouchi, Masanobu Hasegawa, Masahito Niibe, Akiyoshi Suzuki, Katsuhiko Murakami

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.537331

KEYWORDS: Wavefronts, Charge-coupled devices, Extreme ultraviolet lithography, Shearing interferometers, Phase shifts, Diffraction gratings, Projection systems, Algorithm development, Diffraction, Extreme ultraviolet

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Proceedings Article | 13 January 2004 Paper

Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL

Katsura Otaki, Yucong Zhu, Mikihiko Ishii, Shigeru Nakayama, Katsuhiko Murakami, Takashi Gemma

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.507046

KEYWORDS: Wavefronts, Mirrors, Point diffraction interferometers, Extreme ultraviolet lithography, Diffraction, Error analysis, Projection systems, Numerical simulations, Wavefront analysis, Computer simulations

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Proceedings Article | 16 June 2003 Paper

Development of an experimental EUV interferometer for benchmarking several EUV wavefront metrology schemes

Katsuhiko Murakami, Jun Saito, Kazuya Ota, Hiroyuki Kondo, Mikihiko Ishii, Jun Kawakami, Tetsuya Oshino, Katsumi Sugisaki, Yucong Zhu, Masanobu Hasegawa, Yoshiyuki Sekine, Seiji Takeuchi, Chidane Ouchi, Osamu Kakuchi, Yutaka Watanabe, Takayuki Hasegawa, Shinichi Hara, Akiyoshi Suzuki

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.484935

KEYWORDS: Extreme ultraviolet, Wavefront metrology, Wavefronts, Optical testing, Interferometers, Shearing interferometers, Diffraction, Mirrors, Extreme ultraviolet lithography, Diffraction gratings

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Proceedings Article | 24 December 2002 Paper

Development of EUV point diffraction interferometry using the NewSUBARU undulator radiation

Masahito Niibe, Mikihito Mukai, Takeshi Tanaka, Katsumi Sugisaki, Yucong Zhu, Yoshio Gomei

Proceedings Volume 4782, (2002) https://doi.org/10.1117/12.451354

KEYWORDS: Monochromators, Mirrors, Optical testing, Photons, Extreme ultraviolet, Diffraction, Diffraction gratings, EUV optics, Interferometry, Charge-coupled devices

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Proceedings Article | 1 July 2002 Paper

ASET development of at-wavelength phase-shifting point diffraction interferometer

Katsumi Sugisaki, Yucong Zhu, Yoshio Gomei, Masahito Niibe

Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472344

KEYWORDS: Wavefronts, Optical testing, Mirrors, Extreme ultraviolet, Photomasks, Visible radiation, Monochromatic aberrations, Phase shifts, Point diffraction interferometers, Diffraction

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Proceedings Article | 20 December 2001 Paper

Current status of ASET-HIT EUV phase-shifting point diffraction interferometer

Yoshio Gomei, Katsumi Sugisaki, Yucong Zhu, Masahito Niibe, Takeo Watanabe, Hiroo Kinoshita

Proceedings Volume 4506, (2001) https://doi.org/10.1117/12.450962

KEYWORDS: Extreme ultraviolet, Diffraction gratings, Diffraction, Phase shifts, Mirrors, Fringe analysis, CCD cameras, Point diffraction interferometers, Optical testing, Tantalum

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Proceedings Article | 8 November 2000 Paper

Present status of the ASET at-wavelength phase-shifting point diffraction interferometer

Katsumi Sugisaki, Yucong Zhu, Yoshio Gomei, Masahito Niibe, Takeo Watanabe, Hiroo Kinoshita

Proceedings Volume 4146, (2000) https://doi.org/10.1117/12.406675

KEYWORDS: Visible radiation, Extreme ultraviolet, Mirrors, Wavefronts, Interferometers, Information technology, Interferometry, Point diffraction interferometers, Phase shifts, Optical testing

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