Dynamics study of multiwavelength excitation process using F2 and KrF excimer lasers

Kotaro Obata; Koji Sugioka; Takahiro Inamura; Hiroshi Takai; Koichi Toyoda; Katsumi Midorikawa

doi:10.1117/12.479542

17 October 2003 Dynamics study of multiwavelength excitation process using F₂ and KrF excimer lasers

Kotaro Obata, Koji Sugioka, Takahiro Inamura, Hiroshi Takai, Koichi Toyoda, Katsumi Midorikawa

Proceedings Volume 4977, Photon Processing in Microelectronics and Photonics II; (2003) https://doi.org/10.1117/12.479542
Event: High-Power Lasers and Applications, 2003, San Jose, CA, United States

Abstract

Ablation dynamics of fused silica by multiwavelength excitation process using F₂ and KrF excimer laser has been investigated by energy analyzed mass spectrometry of ablated species. The number of Si ion generated by multiwavelength excitation process corresponds to that by single-F₂ laser ablation and to approximately 2.1 times larger than that by single-KrF excimer laser ablation. In addition, kinetic energy distribution of Si⁺ ablated by multiwavelength excitation process shows almost same as that by single-F₂ laser ablation. We regard that absorption of KrF excimer laser by excited state generated by F₂ laser (excited-state absorption: ESA) causes similar electron excitation process to single-F₂ laser irradiation, resulting in enhancement of Si ion with higher kinetic energy and then in high-quality ablation.

Citation Download Citation

Kotaro Obata, Koji Sugioka, Takahiro Inamura, Hiroshi Takai, Koichi Toyoda, and Katsumi Midorikawa "Dynamics study of multiwavelength excitation process using F₂ and KrF excimer lasers", Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); https://doi.org/10.1117/12.479542

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available