This paper describes results from using a microcombustor to create two hydrocarbon gas sensors: one utilizing calorimetry and the other a flame ionization detector (FID) mechanism. The microcombustor consists of a catalytic film deposited on the surface of a microhotplate. This micromachined design has low heat capacity and thermal conductivity, making it ideal for heating catalysts placed on its surface. The catalytic materials provide a natural surface-based method for flame ignition and stabilization and are deposited using a micropen system, which allows precise and repeatable placement of the materials. The catalytic nature of the microcombustor design expands the limits of flammability (LoF) as compared with conventional diffusion flames; an unoptimized LoF of 1-32% for natural gas in air was demonstrated with the microcombustor, whereas conventionally 4-16% is observed. The LoF for hydrogen, methane, propane and ethane are likewise expanded. Expanded LoF permit the use of this technology in applications needing reduced temperatures, lean fuel/air mixes, or low gas flows. By coupling electrodes and an electrometer circuit with the microcombustor, the first ever demonstration of a microFID utilizing premixed fuel and a catalytically-stabilized flame has been performed; the detection of 1.2-2.9 % of ethane in a hydrogen/air mix is shown.
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