Synthetic spatial coherence function for optical tomography and profilometry: influence of the observation condition

Zhihui Duan; Hirokazu Kozaki; Yoko Miyamoto; Joseph Rosen; Mitsuo Takeda

doi:10.1117/12.559139

2 August 2004 Synthetic spatial coherence function for optical tomography and profilometry: influence of the observation condition

Zhihui Duan, Hirokazu Kozaki, Yoko Miyamoto, Joseph Rosen, Mitsuo Takeda

Author Affiliations +

Proceedings Volume 5531, Interferometry XII: Techniques and Analysis; (2004) https://doi.org/10.1117/12.559139
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

We address the basic issue of the observation condition in a synthetic coherence function applied to optical tomography and profilometry, which has not been made clear in previous papers. We present a more general theory for interference fringe formation for spatial coherence control with a synthetic source. The generalized theory predicts the existence of the observation condition that can make the measurement insensitive to the tilt of the object, which will open the new possibility of measuring objects with rough surfaces. We present experimental results that quantitatively verify the validity of the principle and the prediction.

Citation Download Citation

Zhihui Duan, Hirokazu Kozaki, Yoko Miyamoto, Joseph Rosen, and Mitsuo Takeda "Synthetic spatial coherence function for optical tomography and profilometry: influence of the observation condition", Proc. SPIE 5531, Interferometry XII: Techniques and Analysis, (2 August 2004); https://doi.org/10.1117/12.559139

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