Paper
22 January 2005 Fabrication and characterization of polymer microfluidic devices for bio-agent detection
Alfredo M. Morales, John D. Brazzle, Robert W. Crocker, Linda A. Domeier, Eric B. Goods, John T. Hachman Jr., Cindy K. Harnett, Marion C. Hunter, Seethambal S. Mani, Bruce P Mosier, Blake A. Simmons
Author Affiliations +
Abstract
Sandia and Lawrence Livermore National Laboratories are developing a briefcase-sized, broad-spectrum bioagent detection system. This autonomous instrument, the BioBriefcase, will monitor the environment and warn against bacterium, virus, and toxin based biological attacks. At the heart of this device, inexpensive polymer microfluidic chips will carry out sample preparation and analysis. Fabrication of polymer microfluidic chips involves the creation of a master in etched glass; plating of the master to produce a nickel stamp; large lot chip replication by injection molding; and thermal chip sealing. Since the performance and reliability of microfluidic chips are very sensitive to fluidic impedance and to electromagnetic fluxes, the microchannel dimensions and shape have to be tightly controlled during chip fabrication. In this talk, we will present an overview of chip design and fabrication. Metrology data collected at different fabrication steps and the dimensional deviations of the polymer chip from the original design will be discussed.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alfredo M. Morales, John D. Brazzle, Robert W. Crocker, Linda A. Domeier, Eric B. Goods, John T. Hachman Jr., Cindy K. Harnett, Marion C. Hunter, Seethambal S. Mani, Bruce P Mosier, and Blake A. Simmons "Fabrication and characterization of polymer microfluidic devices for bio-agent detection", Proc. SPIE 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV, (22 January 2005); https://doi.org/10.1117/12.592802
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Cited by 1 scholarly publication.
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KEYWORDS
Microfluidics

Polymers

Glasses

Nickel

Interferometry

Glass molding

Metrology

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