Point-diffraction fiber interferometer for vibration desensitization

Jungjae Park; Hagyong Kihm; Seung-Woo Kim

doi:10.1117/12.612473

13 June 2005 Point-diffraction fiber interferometer for vibration desensitization

Jungjae Park, Hagyong Kihm, Seung-Woo Kim

Proceedings Volume 5856, Optical Measurement Systems for Industrial Inspection IV; (2005) https://doi.org/10.1117/12.612473
Event: Optical Metrology, 2005, Munich, Germany

Abstract

We present a new type of point-diffraction interferometer specially designed for industrial use to obtain high immunity to external vibration encountered in the course of measurement process. The proposed interferometer uses thermally- expanded fibers instead of conventional pinholes as the point-diffraction source to obtain a high quality reference wave with an additional advantage of relatively easy alignment of interferometric optical setup. Vibration desensitization is realized through a common-path configuration that allows the influence of vibration to identically affect both the reference wave and the measurement wave and be subsequently cancelled out during the interference of the two waves. A new spatial phase shifter is also added to capture four phase-shifted interferograms simultaneously without time delay using a single camera to avoid vibration effect. Experimental results for a spherical concave mirror prove that the proposed interferometer is capable of providing stable measurements with a level of fringe stabilization of less than 1 nanometer in a typical workshop environment equipped with no excessive ground isolation for anti-vibration. Also, we verify that the proposed interferometer using a short coherence source is applicable to the surface metrology for defect inspection of transparent substrates such as liquid crystal display panels.

Citation Download Citation

Jungjae Park, Hagyong Kihm, and Seung-Woo Kim "Point-diffraction fiber interferometer for vibration desensitization", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); https://doi.org/10.1117/12.612473

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