Dr. Jungjae Park Profile

Dr. Jungjae Park

at Korea Research Institute of Standards and Science

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Author

Publications (11)

Proceedings Article | 15 August 2023 Poster + Paper

Thickness analysis of double-layered thin-film sample using spectral reflectometry

J. Park, J. Bae, Y.-S. Jang, J. Jin

Proceedings Volume 12618, 1261826 (2023) https://doi.org/10.1117/12.2673343

KEYWORDS: Thin films, Film thickness, Multilayers, Reflectivity, Reflectometry, Silicon, Model-based design, Reflection

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Proceedings Article | 3 October 2022 Presentation + Paper

An interferometric method for simultaneous measurement of thickness, refractive index, and surface profile of a silicon wafer

Jungjae Park, Jaeseok Bae, Jonghan Jin

Proceedings Volume 12221, 122210R (2022) https://doi.org/10.1117/12.2632346

KEYWORDS: Refractive index, Semiconducting wafers, Silicon, Interferometers, Wafer-level optics, Optical testing, Mirrors, Integrated optics, Beam splitters, Statistical analysis

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Proceedings Article | 3 October 2022 Presentation + Paper

Absolute distance measurement using polarization-based spectral-domain interferometer with dual reference path

Jonghan Jin, Yeongjun Kim, Heulbi Ahn, Jungjae Park

Proceedings Volume 12221, 122210Q (2022) https://doi.org/10.1117/12.2632344

KEYWORDS: Mirrors, Interferometers, Distance measurement, Polarization, Beam splitters, Light sources, Spectroscopy, Surface plasmons, Reflectivity, Numerical simulations

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Proceedings Article | 21 June 2019 Paper

Precise thickness measurement and comparison of step-shaped microfluidic channel mold using optical interferometry

Jungjae Park, Jaeseok Bae, Jonghan Jin

Proceedings Volume 11056, 110561R (2019) https://doi.org/10.1117/12.2525970

KEYWORDS: Refractive index, Silicon, Semiconducting wafers, Microfluidics, Interferometers, Optical interferometry, Profilometers, Optical testing

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Proceedings Article | 21 June 2019 Paper

Analysis of measurement error caused by swing motion for determining the physical thickness and group refractive index of a large glass panel

Jonghan Jin, Jaeseok Bae, Jungjae Park

Proceedings Volume 11056, 1105604 (2019) https://doi.org/10.1117/12.2525670

KEYWORDS: Glasses, Refractive index, Error analysis, Interferometers, Motion measurement, Light sources, Optical interferometry, Motion analysis, Inspection, Mathematical modeling

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Proceedings Article | 28 May 2014 Paper

Dimensional metrology on a semiconductor packaging process using an optical comb

Jungjae Park, Jonghan Jin, Saerom Maeng

Proceedings Volume 9110, 91100O (2014) https://doi.org/10.1117/12.2049522

KEYWORDS: Semiconducting wafers, Silicon, Wafer-level optics, Interferometers, Semiconductors, Packaging, Geometrical optics, Metrology, Light sources, Spectroscopy

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Proceedings Article | 5 June 2013 Paper

Uncertainty evaluation of the geometrical thickness and refractive index of silicon wafers

Jonghan Jin, Jungjae Park, Jae Wan Kim, Jong-Ahn Kim, Chu-Shik Kang

Proceedings Volume 8706, 87060W (2013) https://doi.org/10.1117/12.2014800

KEYWORDS: Semiconducting wafers, Silicon, Refractive index, Wafer-level optics, Geometrical optics, Fourier transforms, Light sources, Pulsed laser operation, Spectroscopy, Femtosecond phenomena

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Proceedings Article | 5 June 2013 Paper

Simultaneous measurement of the thickness profile and refractive index distribution of silicon wafers

Jungjae Park, Jonghan Jin, Jae Wan Kim, Chu-Shik Kang, Jong-Ahn Kim

Proceedings Volume 8706, 87060V (2013) https://doi.org/10.1117/12.2014799

KEYWORDS: Refractive index, Semiconducting wafers, Silicon, Pulsed laser operation, Femtosecond phenomena, Wafer-level optics, Phase measurement, Reliability, Semiconductor lasers, Light sources

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Proceedings Article | 10 September 2009 Paper

Continuous scanning phase measurement for high immunity to vibration

Jungjae Park, Joonho You, Seung-Woo Kim

Proceedings Volume 7432, 74320O (2009) https://doi.org/10.1117/12.825793

KEYWORDS: Phase measurement, Single mode fibers, Spherical lenses, Interferometers, Detection and tracking algorithms, Mirrors, Error analysis, Phase shifting, Ferroelectric materials, Wavefronts

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Proceedings Article | 14 August 2006 Paper

A point-diffraction interferometer with vibration-desensitizing capability

Hagyong Kihm, Jungjae Park, Taekmin Kwon, Joon Ho You, Seung-Woo Kim

Proceedings Volume 6293, 62930B (2006) https://doi.org/10.1117/12.678691

KEYWORDS: Interferometers, Optical fibers, Phase shifts, Beam splitters, Wave plates, Spherical lenses, Semiconducting wafers, Polarization, Waveguides, Wavefronts

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Proceedings Article | 13 June 2005 Paper

Point-diffraction fiber interferometer for vibration desensitization

Jungjae Park, Hagyong Kihm, Seung-Woo Kim

Proceedings Volume 5856, (2005) https://doi.org/10.1117/12.612473

KEYWORDS: Interferometers, Glasses, Phase shifts, Spherical lenses, Beam splitters, Wavefronts, Polarization, Waveguides, Mirrors, Wave plates

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Showing 5 of 11 publications

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