CONFERENCE PROCEEDINGS
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Joonho You
at KAIST
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Author
Publications (4)
Proceedings Article | 10 September 2009 Paper
Continuous scanning phase measurement for high immunity to vibration
Proceedings Volume 7432, 74320O (2009) https://doi.org/10.1117/12.825793
KEYWORDS: Phase measurement, Single mode fibers, Spherical lenses, Interferometers, Detection and tracking algorithms, Mirrors, Error analysis, Phase shifting, Ferroelectric materials, Wavefronts
Proceedings Article | 11 August 2008 Paper
Angle-resolved reflectometer for thickness measurement of multi-layered thin-film structures
Proceedings Volume 7063, 70630Q (2008) https://doi.org/10.1117/12.797523
KEYWORDS: Thin films, Objectives, Reflectometry, Reflectivity, Metrology, Optical filters, Polarization, Interfaces, Light, Data modeling
Proceedings Article | 14 September 2007 Paper
Simultaneous measurements of thin-film thickness and refractive index by dispersive white-light interferometry
Proceedings Volume 6674, 667402 (2007) https://doi.org/10.1117/12.732311
KEYWORDS: Thin films, Interferometry, Silicon, Refractive index, Mirrors, Optical filters, Chemical mechanical planarization, Inspection, Semiconductors, 3D displays
Proceedings Article | 18 June 2007 Paper
Dispersive white light interferometry for 3D inspection of thin film layers of flat panel displays
Proceedings Volume 6616, 66160T (2007) https://doi.org/10.1117/12.726040
KEYWORDS: Thin films, Interferometry, Spectroscopy, Metrology, Inspection, Charge-coupled devices, 3D metrology, 3D acquisition, Data modeling, Phase measurement
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