Dr. Chu-Shik Kang Profile

Dr. Chu-Shik Kang

Principal Researcher at Korea Research Institute of Standards and Science

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Author

Publications (16)

SPIE Journal Paper | 27 May 2022 Open Access

Time-of-flight measurement-based three-dimensional profiler system employing a lightweight Fresnel-type Risley prism scanner

Jae Heun Woo, Chu-Shik Kang, Jong-Ahn Kim, Jae Wan Kim, Sunghoon Eom, Jae Yong Lee

OE, Vol. 61, Issue 05, 054104, (May 2022) https://doi.org/10.1117/12.10.1117/1.OE.61.5.054104

KEYWORDS: 3D metrology, Prisms, 3D scanning, 3D acquisition, Laser scanners, Clouds, Scanners, Distortion, Optical engineering, 3D-TOF imaging

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Proceedings Article | 5 June 2013 Paper

Uncertainty evaluation of the geometrical thickness and refractive index of silicon wafers

Jonghan Jin, Jungjae Park, Jae Wan Kim, Jong-Ahn Kim, Chu-Shik Kang

Proceedings Volume 8706, 87060W (2013) https://doi.org/10.1117/12.2014800

KEYWORDS: Semiconducting wafers, Silicon, Refractive index, Wafer-level optics, Geometrical optics, Fourier transforms, Light sources, Pulsed laser operation, Spectroscopy, Femtosecond phenomena

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Proceedings Article | 5 June 2013 Paper

Simultaneous measurement of the thickness profile and refractive index distribution of silicon wafers

Jungjae Park, Jonghan Jin, Jae Wan Kim, Chu-Shik Kang, Jong-Ahn Kim

Proceedings Volume 8706, 87060V (2013) https://doi.org/10.1117/12.2014799

KEYWORDS: Refractive index, Semiconducting wafers, Silicon, Pulsed laser operation, Femtosecond phenomena, Wafer-level optics, Phase measurement, Reliability, Semiconductor lasers, Light sources

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SPIE Journal Paper | 1 May 2011

Vacuum wavelength calibration of frequency-stabilized He-Ne lasers used in commercial laser

Won-Kyu Lee, Ho Suhng Suh, Chu Shik Kang

OE, Vol. 50, Issue 05, 054301, (May 2011) https://doi.org/10.1117/12.10.1117/1.3570680

KEYWORDS: Calibration, Laser stabilization, Interferometers, Helium neon lasers, Iodine cells, Data acquisition, Manufacturing, Optical engineering, Precision calibration, Neon

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Proceedings Article | 14 May 2010 Paper

One-shot measurement of surface profile using an astigmatic microscope system

C.-S. Kang, J.-U. Lee, J. W. Kim, J.-A. Kim, J. Jin, T. B. Eom

Proceedings Volume 7718, 77180X (2010) https://doi.org/10.1117/12.854124

KEYWORDS: Point spread functions, 3D metrology, Cylindrical lenses, Optical components, Sensors, Cerium, Microscopes, Computer simulations, Monochromatic aberrations, Calibration

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Proceedings Article | 17 June 2009 Paper

Gauge block calibration by using a high speed phase shifting interferometer comprising two frequency scanning diode lasers

Jae Wan Kim, Jong-Ahn Kim, Roma Jang, Chu-Shik Kang

Proceedings Volume 7389, 73890U (2009) https://doi.org/10.1117/12.827455

KEYWORDS: Interferometers, Semiconductor lasers, Phase shifting, Calibration, Phase shifts, Laser stabilization, Light sources, Phase interferometry, Interferometry, Confocal microscopy

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Proceedings Article | 10 September 2007 Paper

Calibration of integrating sphere system designed for roughness correction in optical calibration of gauge blocks

Chu-Shik Kang, Jae Wan Kim, Jong-Ahn Kim, Tae Bong Eom

Proceedings Volume 6672, 66720O (2007) https://doi.org/10.1117/12.733712

KEYWORDS: Calibration, Integrating spheres, Phase shifts, Surface roughness, Light scattering, Optical calibration, Reflection, System integration, Scattering, Optical interferometry

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Proceedings Article | 10 September 2007 Paper

Development of a precision dual level stage system for the dimensional metrology of large range surface topography

Jong-Ahn Kim, Jae Wan Kim, Tae Bong Eom, Chu-Shik Kang

Proceedings Volume 6672, 66720T (2007) https://doi.org/10.1117/12.732617

KEYWORDS: Interferometers, Mirrors, Metrology, Field programmable gate arrays, Dimensional metrology, Ferroelectric materials, Motion measurement, Control systems, Amplifiers, Scanning probe microscopy

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Proceedings Article | 14 August 2006 Paper

Absolute length calibration of gauge blocks using optical comb of a femtosecond pulse laser

Jonghan Jin, Young-Jin Kim, Yunseok Kim, Chu-Shik Kang, Seung-Woo Kim

Proceedings Volume 6292, 62920O (2006) https://doi.org/10.1117/12.678448

KEYWORDS: Calibration, Femtosecond phenomena, Interferometers, Rubidium, Interferometry, Pulsed laser operation, Laser stabilization, Clocks, Laser optics, Barium

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Proceedings Article | 18 August 2005 Paper

Calibration of two-dimensional nanometer gratings using optical diffractometer and metrological atomic force microscope

Jong-Ahn Kim, Jae Wan Kim, Byong Chon Park, Tae Bong Eom, Chu-Shik Kang

Proceedings Volume 5879, 58790Z (2005) https://doi.org/10.1117/12.614786

KEYWORDS: Calibration, Metrology, Diffraction, Interferometers, Atomic force microscope, Beam splitters, Scanning electron microscopy, Sensors, Temperature metrology, Diffraction gratings

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Proceedings Article | 18 August 2005 Paper

A novel Michelson interferometer combined with an autocollimator for the simultaneous measurement of linear and angular displacement

Jae Wan Kim, Jong-Ahn Kim, Chu-Shik Kang, Tae Bong Eom

Proceedings Volume 5879, 587911 (2005) https://doi.org/10.1117/12.616497

KEYWORDS: Autocollimators, Mirrors, Interferometers, Motion measurement, Mica, Michelson interferometers, Wave plates, Beam splitters, Polarization, Prototyping

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Proceedings Article | 18 August 2005 Paper

Automatic measurement of gauge blocks by Fourier transforming the scanned interferograms

Chu-Shik Kang, Jae Wan Kim, Ho Suhng Suh, Won-Kyu Lee

Proceedings Volume 5879, 587905 (2005) https://doi.org/10.1117/12.616858

KEYWORDS: Fourier transforms, Interferometry, Interferometers, Calibration, Data acquisition, Lamps, Mirrors, Optical fibers, Spatial frequencies, Modulation

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Proceedings Article | 30 May 2003 Paper

Novel interferometer for three-dimensional coordinate measurement of freely moving objects

Jae Wan Kim, Chu-Shik Kang, Tae Bong Eom

Proceedings Volume 5144, (2003) https://doi.org/10.1117/12.500417

KEYWORDS: Interferometers, Sensors, Optical fibers, Beam splitters, Spherical lenses, 3D metrology, Signal detection, Fiber lasers, Laser stabilization, Distance measurement

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Proceedings Article | 30 September 1998 Paper

Double-ended Fizeau interferometers with phase-stepping evaluation for measurement of cubes

R. Arnold Nicolaus, Chu-Shik Kang, Gerhard Boensch

Proceedings Volume 3477, (1998) https://doi.org/10.1117/12.323098

KEYWORDS: Interferometers, Fabry–Perot interferometers, Fizeau interferometers, Phase interferometry, Interferometry, Phase measurement, Phase shifts, Calibration, CCD cameras, Glasses

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Proceedings Article | 1 September 1996 Paper

Calibrating vertical magnification of surface roughness tester by using EMT and heterodyne laser interferometer

Chu-Shik Kang

Proceedings Volume 2778, 27785G (1996) https://doi.org/10.1117/12.2299079

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Proceedings Article | 10 December 1993 Paper

Holographic fringe interpretation by FFT and carrier-fringe method

Yeong-Uk Ko, Chu-Shik Kang, Myung-Sai Chung, Young Kwon

Proceedings Volume 2003, (1993) https://doi.org/10.1117/12.165457

KEYWORDS: Fringe analysis, Holography, Modulation, Time metrology, Interferometry, Silicon, Semiconducting wafers, Holographic interferometers, Digital image processing, Mirrors

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Showing 5 of 16 publications

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